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Erschienen in: Microsystem Technologies 4/2012

01.04.2012 | Technical Paper

VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers

verfasst von: Darcy T. Haluzan, David M. Klymyshyn, Sven Achenbach, Martin Börner, Jürgen Mohr

Erschienen in: Microsystem Technologies | Ausgabe 4/2012

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Abstract

An efficient method is presented to determine the mechanical properties of thick metal layers using the pull-in voltage of electrostatically actuated structures. To fabricate these high aspect ratio beams without severe deformations, additional features were added, which made existing pull-in voltage equations inaccurate and therefore corrections were necessary. ANSYS Multiphysics was used to analyze the differences between ideal beams and the fabricated beams. To demonstrate the proposed approach, both nickel and gold devices were fabricated. To extract the material property values, a sum of least squares fitting scheme was used. A Young’s modulus of 186.2 and 60.8 GPa was obtained for nickel and gold structures respectively. Both values are significantly smaller than values reported for bulk material, but fall within the range of values reported in the literature.

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Metadaten
Titel
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers
verfasst von
Darcy T. Haluzan
David M. Klymyshyn
Sven Achenbach
Martin Börner
Jürgen Mohr
Publikationsdatum
01.04.2012
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 4/2012
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1408-6

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