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Electromagnetic modeling and parameter extraction of RF-MEMS switch

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Abstract

The electromagnetic model of RF-MEMS switch is used to accurately determine the electrical parameters (resistance, inductance and capacitance of MEMS bridge) from S-parameter measurement. It is observed that non-uniform serpentine spring based inductively tuned switch exhibit isolation of more than 30 dB for multiple resonant frequencies ranging from Ka band to Ku band. Comparison between computed and simulated results shows the close agreement which gives the validity of proposed study.

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Acknowledgments

One of the author (A. K. Sharma) would like to thank Dr. Debashis Pal, CSIR-CEERI, Pilani, India for their valuable support in doing simulation work reported in this paper.

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Authors and Affiliations

  1. Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani, 333 031, Rajasthan, India

    Ashish Kumar Sharma & Navneet Gupta

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  1. Ashish Kumar Sharma
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  2. Navneet Gupta
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Correspondence to Navneet Gupta.

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Sharma, A.K., Gupta, N. Electromagnetic modeling and parameter extraction of RF-MEMS switch. Microsyst Technol 21, 181–185 (2015). https://doi.org/10.1007/s00542-013-1952-3

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  • DOI: https://doi.org/10.1007/s00542-013-1952-3

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