nach oben

Microsystem Technologies

Erschienen in:

16.06.2015 | Technical Paper

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

verfasst von: Li-Ya Ma, Anis Nurashikin Nordin, Norhayati Soin

Erschienen in: Microsystem Technologies | Ausgabe 3/2016

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is electrostatically actuated. The structure contains a coplanar waveguide, a big suspended membrane, four folded beams to support the membrane and four straight beams to provide the bias voltage. The switch is designed in standard 0.35 µm complementary metal oxide semiconductor process and has a very low pull-in voltage of 3.04 V. Taguchi method and weighted principal component analysis is employed to optimize the geometric parameters of the beams, in order to obtain a low spring constant, low pull-in voltage, and a robust design. The optimized parameters were obtained as w = 2.5 µm, L1 = 30 µm, L2 = 30 µm and L3 = 65 µm. The mechanical and electrical behaviours of the RF-MEMS switch were simulated by the finite element modeling in software of COMSOL Multiphysics 4.3^® and IntelliSuite v8.7^®. RF performance of the switch was obtained by simulation results, which are insertion loss of −5.65 dB and isolation of −24.38 dB at 40 GHz.

Vorheriger Artikel The robustness of an algorithm applied in wafer-level material property extraction

Nächster Artikel Characterization of strain microgauges for the monitoring of the deformations of a medical needle during its insertion in human tissues

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Afrang S, Abbaspour-Sani E (2006) A low voltage MEMS structure for RF capacitive switches. Prog Electromagn Res 65:157–167. doi:10.2528/PIER06093001 CrossRef

Badia M-B, Buitrago E, Ionescu AM (2012) RF MEMS shunt capacitive switches using AlN compared to dielectric. J Microelectromech Syst 21(5):1229–1240. doi:10.1109/JMEMS.2012.2203101 CrossRef

Balaraman D, Bhattacharya SK, Ayazi F, Papapolymerou J (2002) Low-cost low actuation voltage copper RF MEMS switches. In: IEEE MTT-S International Microwave Symposium Digest 2002, vol 2, pp 1225–1228. doi:10.1109/MWSYM.2002.1011879

Bao MH (2000) Micro mechanical transducers: pressure sensors, accelerometers and gyroscopes, vol 8. Elsevier

Chan R, Lesnick R, Becher D, Feng M (2003) Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles. J Microelectromech Syst 12(5):713–719. doi:10.1109/JMEMS.2003.817889 CrossRef

Chen M-T, Harichandran R (1998) Statistics of the von Mises stress response for structures subjected to random excitations. Shock Vib 5(1):13–21. doi:10.1155/1998/162424 CrossRef

Cho I-J, Yoon E (2010) Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold. J Micromech Microeng 20(3):035028. doi:10.1088/0960-1317/20/3/035028 CrossRef

Chu C-H, Shih W-P, Chung S-Y, Tsai H-C, Shing T-K, Chang P-Z (2007) A low actuation voltage electrostatic actuator for RF MEMS switch applications. J Micromech Microeng 17(8):1649. doi:10.1088/0960-1317/17/8/031 CrossRef

Dai C-L, Chen J-H (2006) Low voltage actuated RF micromechanical switches fabricated using CMOS-MEMS technique. Microsyst Technol 12(12):1143–1151. doi:10.1007/s00542-006-0243-7 CrossRef

Dai C, Peng H, Liu M, Wu C, Yang L (2005) Design and fabrication of RF MEMS switch by the CMOS process. Tamkang J Sci Eng 8(3):197. doi:10.6180/jase.2005.8.3.03

Daneshmand M, Fouladi S, Mansour RR, Lisi M, Stajcer T (2009) Thermally actuated latching RF MEMS switch and its characteristics. IEEE Trans Microw Theory Tech 57(12):3229–3238. doi:10.1109/TMTT.2009.2033866 CrossRef

Fahsyar PNA, Soin N (2012) Optimization of design parameters for radiofrequency identification tag rectifier using taguchi methods. IETE Tech Rev 29(2):157–161. doi:10.4103/0256-4602.95387#.VVIsk_yUfNc CrossRef

Fan Z, Liu E, Xu B (2011) Weighted principal component analysis. In Artificial Intelligence and Computational Intelligence, Springer, pp 569–574. doi:10.1007/978-3-642-23896-3_70

Fouladi S, Mansour RR (2010) Capacitive RF MEMS switches fabricated in standard 0.35-CMOS technology. Microw Theory Tech IEEE Trans 58(2):478–486. doi:10.1109/TMTT.2009.2038446 CrossRef

Fraley S, Oom M, Terrien B, Date J (2006) Design of experiments via Taguchi methods: orthogonal arrays. The Michigan chemical process dynamic and controls open text book, USA, vol 2. No.3. p 4. https://controls.engin.umich.edu/wiki/index.php/Design_of_experiments_via_taguchi_methods:_orthogonal_arrays

Glickman M, Tseng P, Harrison J, Niblock T, Goldberg IB, Judy JW (2011) High-performance lateral-actuating magnetic MEMS switch. J Microelectromech Syst 20(4):842–851. doi:10.1109/JMEMS.2011.2159096 CrossRef

Gong Y, Zhao F, Xin H, Lin J, Bai Q. Simulation and Optimal Design for RF MEMS Cantilevered Beam Switch. In: IEEE International Conference on Future Computer and Communication 2009 (FCC’09), pp 84–87. doi:10.1109/FCC.2009.45

Gupta RK (1997) Electrostatic pull-in test structure design for in situ mechanical property measurements of microelectromechanical systems (MEMS). Doctoral dissertation, Massachusetts Institute of Technology. doi=10.1.1.142.1713&rep=rep1&type=pdf. http://citeseerx.ist.psu.edu/viewdoc/download;jsessionid=F890E3D4544E36D79977815A8EC7E36E?

Jaafar H, Sidek O, Miskam A, Korakkottil S (2009) Design and simulation of microelectromechanical system capacitive shunt switches. Am J Eng Appl Sci 2(4):655. doi:10.3844/ajeassp.2009.655.660 CrossRef

Kim J-M, Lee S, Park J-H, Baek C-W, Kwon Y, Kim Y-K (2010) Electrostatically driven low-voltage micromechanical RF switches using robust single-crystal silicon actuators. J Micromech Microeng 20(9):095007. doi:10.1088/0960-1317/20/9/095007 CrossRef

Kuwabara K, Sato N, Shimamura T, Morimura H, Kodate J, Sakata T, et al. (2006) RF CMOS-MEMS switch with low-voltage operation for single-chip RF LSIs. In: IEEE International Electron Devices Meeting 2006 (IEDM’06), pp 1–4. doi:10.1109/IEDM.2006.346891

Lakamraju NV, Phillips SM (2005) Bi-stable RF MEMS switch with low actuation voltage. Proc Int Symp Microelectron. http://engr.case.edu/liberatore_vincenzo/NetBots/NewimapsPhillips2.pdf

Lee S-D, Jun B-C, Kim S-D, Park H-C, Rhee J-K, Mizuno K (2006) An RF-MEMS switch with low-actuation voltage and high reliability. J Microelectromech Syst 15(6):1605–1611. doi:10.1109/JMEMS.2006.886394 CrossRef

Li T-S, Su C-T, Chiang T-L (2003) Applying robust multi-response quality engineering for parameter selection using a novel neural–genetic algorithm. Comput Ind 50(1):113–122. doi:10.1016/S0166-3615(02)00140-9 CrossRef

Liao H-C (2006) Multi-response optimization using weighted principal component. Int J Adv Manuf Technol 27(7–8):720–725. doi:10.1007/s00170-004-2248-7 CrossRef

Mafinejad Y, Kouzani A, Mafinezhad K, Mashad I (2013) Review of low actuation voltage RF MEMS electrostatic switches based on metallic and carbon alloys. J Microelectron Electron Compon Mater 43(2):85–96. http://hdl.handle.net/10536/DRO/DU:30055302

Meng T, Butler C (1997) Solving multiple response optimisation problems using adaptive neural networks. Int J Adv Manuf Technol 13(9):666–675. doi:10.1007/BF01350825 CrossRef

Park SH, Antony J (2008) Robust design for quality engineering and Six Sigma: World Scientific

Park J-H, Lee H-C, Park Y-H, Kim Y-D, Ji C-H, Bu J et al (2006) A fully wafer-level packaged RF MEMS switch with low actuation voltage using a piezoelectric actuator. J Micromech Microeng 16(11):2281. doi:10.1088/0960-1317/16/11/005 CrossRef

Peroulis D, Pacheco SP, Sarabandi K, Katehi LP (2003) Electromechanical considerations in developing low-voltage RF MEMS switches. IEEE Trans Microw Theory Tech 51(1):259–270. doi:10.1109/TMTT.2002.806514 CrossRef

Persano A, Tazzoli A, Farinelli P, Meneghesso G, Siciliano P, Quaranta F (2012) K-band capacitive MEMS switches on GaAs substrate: design, fabrication, and reliability. Microelectron Reliab 52(9):2245–2249. doi:10.1016/j.microrel.2012.06.008 CrossRef

Philippine MA, Sigmund O, Rebeiz GM, Kenny TW (2013) Topology optimization of stressed capacitive RF MEMS switches. J Microelectromech Syst 22(1):206–215. doi:10.1109/JMEMS.2012.2224640 CrossRef

Pinto da Costa JF, Alonso H, Roque L (2011) A weighted principal component analysis and its application to gene expression data. IEEE/ACM Trans Comput Biol Bioinform (TCBB) 8(1):246–252. doi:10.1109/TCBB.2009.61 CrossRef

Rebeiz GM (2003) RF MEMS—theory, design, and technology. John Wiley & Sons Inc, Hoboken, p 32

Roy RK (2010) A primer on the Taguchi method: Society of Manufacturing Engineers

Shalaby MM, Wang Z, Chow LL-W, Jensen BD, Volakis JL, Kurabayashi K et al (2009) Robust design of RF-MEMS cantilever switches using contact physics modeling. IEEE Trans Industr Electron 56(4):1012–1021. doi:10.1109/TIE.2008.2006832 CrossRef

Su C-T, Yeh C-J (2011) Optimization of the Cu wire bonding process for IC assembly using Taguchi methods. Microelectron Reliab 51(1):53–59. doi:10.1016/j.microrel.2010.09.007 CrossRefMathSciNet

Taguchi G, Clausing D, Watanabe LT (1987) System of experimental design: engineering methods to optimize quality and minimize costs (vol 2): UNIPUB/Kraus International Publications White Plains, New York

Wu F-C, Chyu C-C (2004) Optimization of correlated multiple quality characteristics robust design using principal component analysis. J Manuf Syst 23(2):134–143. doi:10.1016/S0278-6125(05)00005-1 CrossRef

Wey IC, Huang CH, Chow HC (2002) A new low-voltage CMOS 1-bit full adder for high performance applications. In: Proceedings of IEEE Asia-Pacific Conference on ASIC, 2002, pp 21–24. doi:10.1109/APASIC.2002.1031522

Ya ML, Nordin AN, Soin N, Design and analysis of a low-voltage electrostatic actuated RF CMOS-MEMS switch. In: IEEE Regional Symposium on Micro and Nanoelectronics (RSM2013). pp 41–44. doi:10.1109/RSM.2013.6706468

Yao ZJ, Chen S, Eshelman S, Denniston D, Goldsmith C (1999) Micromachined low-loss microwave switches. Microelectromech Syst J 8(2):129–134. doi:10.1109/84.767108 CrossRef

Yusoff Y, Zoolfakar AS, Aman S, Ahmad MR (2004) Design and characterization of input and output (I/O) pads. In: IEEE International Conference on Semiconductor Electronics (ICSE 2004), p 7. doi:10.1109/SMELEC.2004.1620941

Titel: Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch
verfasst von: Li-Ya Ma
Anis Nurashikin Nordin
Norhayati Soin
Publikationsdatum: 16.06.2015
Verlag: Springer Berlin Heidelberg
Erschienen in: Microsystem Technologies / Ausgabe 3/2016
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-015-2585-5

Neuer Inhalt

Bildnachweise

VDI-Icon, Profil Icon, inhalt2, Springer Professional Modul/© Springer Fachmedien Wiesbaden GmbH, Nachhaltigkeitsaward Key Visual/© Cometis AG/Global ESG Monitor | Daniel Rupp | Generiert mit KI, Search Icon, Banner Hanser, Kryptowährungen/© gopixa / Getty Images / iStock, MG4 aus China auf dem Prüfstand im ADAC-Technik-Zentrum in Landsberg am Lech/© ADAC e.V., Chassis eines Elektrofahrzeugs/© chesky / stock.adobe.com, Zeitschrift Wissensmanagement Cover, PatentFit-Logo/© Springer Fachmedien Wiesbaden GmbH, Sustainibility Finance/© Robert Kneschke / stock.adobe.com / Springer Fachmedien Wiesbaden GmbH, Zukunftswerkstatt Sales Excellence 2024/© AndreyPopov / Getty Images / iStock, 2023_Antrieb/© supervisuell

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 3/2016

Microwave atomic force microscope: MG63 osteoblast-like cells analysis on nanometer scale

Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range

Meter-scale large-area capacitive pressure sensors with fabric with stripe electrodes of conductive polymer-coated fibers

Robust design optimization of electro-thermal microactuator using probabilistic methods

Low temperature wafer level conformal polymer dielectric spray coating for through silicon vias with 2:1 aspect ratio

Fabrication, simulations, and measurements of self-assembled millimeter-wave antennas for system-on-chip applications

Neuer Inhalt

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.