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Microsystem Technologies
Erschienen in: Microsystem Technologies 10/2018

10.01.2018 | Technical Paper

Ammonia gas sensors with Au-decorated carbon nanotubes

verfasst von: S. J. Young, Z. D. Lin

Erschienen in: Microsystem Technologies | Ausgabe 10/2018

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Abstract

In this study, high-density carbon nanotubes (CNTs) are grown on an oxidized Si substrate by thermal chemical vapor deposition (CVD). CNTs were synthesized by thermal CVD at 700 °C in a C2H2 atmosphere and used to fabricate a gas sensing-device. The average length and diameter of the CNTs were about ~ 4.52 μm and ~ 45 nm, respectively. Au nanoparticles were coated onto nanotube surfaces to a thickness of approximately 5 nm and the CNTs thus formed could be utilized to sense acetone vapor. In 800 ppm ammonia (NH3) vapor at room temperature, the adsorption of Au nanoparticles increased the sensitivities of the device to these species from 1.11, 1.54, 2.03, 2.44 and 2.74%, respectively.
Vorheriger Artikel Micro and nanostructure based electrochemical sensor platform for glutamate detection
Nächster Artikel Spin-coated single walled carbon nanotubes confirms p–n junction diode behavior

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Metadaten
Titel
Ammonia gas sensors with Au-decorated carbon nanotubes
verfasst von
S. J. Young
Z. D. Lin
Publikationsdatum
10.01.2018
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 10/2018
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-018-3712-x

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