Abstract
In this study, nickel and nickel-iron alloy microsamples produced using the LIGA technique are investigated. With vibration tests and tensile tests, design parameters such as Young’s modulus, elastic limit, and failure stress are determined. A new microsample tensile test apparatus is presented, in which forces and elongation are separately measured with very high accuracy. The comparison between the Young’s modulus which is determined with vibration experiments and the Young’s modulus derived from tensile tests ensures the reliability of the measurements presented. The error sources are analysed with the help of finite element models and the uncertainty in determining the Young’s modulus is calculated. The strength values measured for LIGA specimens are about 3 times higher than for comparable macroscopic specimens.
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Received 27 February 1996 / Accepted: 11 March 1996
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Mazza, E., Abel, S. & Dual, J. Experimental determination of mechanical properties of Ni and Ni-Fe microbars. Microsystem Technologies 2, 197–202 (1996). https://doi.org/10.1007/s005420050044
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DOI: https://doi.org/10.1007/s005420050044