Abstract
Micro-fluidic channel was fabricated on a PMMA sheet (thickness of 1.5 mm) using 248 nm excimer laser direct-writing technique. The influence of excimer laser fluence on the micromachining quality (channel’s depth and surface roughness) was analyzed. Higher laser fluence results in the augmentation of channel’s depth and surface roughness. The excimer laser polishing processing is favorable for the improvement of surface roughness. However, over-abundant polishing will generate tenuous stripe on the channel’s edge and worsen the surface roughness.
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Heng, Q., Tao, C. & Tie-chuan, Z. Surface roughness analysis and improvement of micro-fluidic channel with excimer laser. Microfluid Nanofluid 2, 357–360 (2006). https://doi.org/10.1007/s10404-006-0078-7
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DOI: https://doi.org/10.1007/s10404-006-0078-7