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Dynamics and pull-in instability of electrostatically actuated microbeams conveying fluid

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Abstract

The purpose of this paper is to develop a theoretical model for predicting the dynamics and pull-in mechanism of electrostatically actuated microbeams containing internal fluid flow. By considering the effects of nonuniform profile of the flow velocity, material length scale parameter of the microbeam and nonlinear electrostatical force, the equation of motion of the microbeam has been presented. The lateral displacement of the microbeam consists of two parts: a static (steady) displacement and a perturbation displacement about the static. Based on the general differential quadrature rule, the static deflection of the microbeam is calculated numerically. The obtained static deflection is then used to solve the equation governing the perturbed displacement. The natural frequency and flow-induced instability of the microbeam are analyzed for both clamped–clamped and cantilevered boundary conditions. Results show that the internal fluid flow could dramatically affect the static deflection of the microbeam and hence the pull-in voltage. The electric voltage, on the other hand, would significantly influence the dynamics of the microbeam.

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Acknowledgments

The authors gratefully acknowledge the support provided by the National Natural Science Foundation of China (Nos. 11172107 and 11172109), the Program for New Century Excellent Talents in University of China (NCET-11-0183), Natural Science Foundation of Hubei Province (2013CFA130), and the Fundamental Research Funds for the Central Universities, HUST (2012QN023, 2014YQ007).

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Authors and Affiliations

  1. Department of Mechanics, Huazhong University of Science and Technology, Wuhan, 430074, People’s Republic of China

    H. L. Dai, L. Wang & Q. Ni

  2. Hubei Key Laboratory for Engineering Structural Analysis and Assessment, Wuhan, 430074, People’s Republic of China

    H. L. Dai, L. Wang & Q. Ni

Authors
  1. H. L. Dai
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  2. L. Wang
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  3. Q. Ni
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Correspondence to L. Wang.

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Dai, H.L., Wang, L. & Ni, Q. Dynamics and pull-in instability of electrostatically actuated microbeams conveying fluid. Microfluid Nanofluid 18, 49–55 (2015). https://doi.org/10.1007/s10404-014-1407-x

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  • DOI: https://doi.org/10.1007/s10404-014-1407-x

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