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Acta Mechanica Sinica
Erschienen in: Acta Mechanica Sinica 2/2018

14.09.2017 | Review Paper

Micromechanics of substrate-supported thin films

verfasst von: Wei He, Meidong Han, Shibin Wang, Lin-An Li, Xiuli Xue

Erschienen in: Acta Mechanica Sinica | Ausgabe 2/2018

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Abstract

The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed.
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Metadaten
Titel
Micromechanics of substrate-supported thin films
verfasst von
Wei He
Meidong Han
Shibin Wang
Lin-An Li
Xiuli Xue
Publikationsdatum
14.09.2017
Verlag
The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
Erschienen in
Acta Mechanica Sinica / Ausgabe 2/2018
Print ISSN: 0567-7718
Elektronische ISSN: 1614-3116
DOI
https://doi.org/10.1007/s10409-017-0697-0

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