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Erschienen in:
01.09.2008
Effect of chelating agents on the preferred orientation of ZnO films by sol-gel process
Erschienen in: Journal of Materials Science | Ausgabe 18/2008
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Abstract
The effect of chelating agents of ZnO precursor solutions on crystallization behavior was investigated. Two different additives, monoethanolamine (MEA) and diethanolamine (DEA), and crystalline Pt (111)/Si and amorphous SiNx/Si substrates, were used for this study. ZnO film grown on SiNx/Si from a DEA-chelated precursor solution shows a poorly oriented microstructure with weak crystallization peaks, while ZnO film grown on Pt(111)/Si shows a c-axis preferred orientation. In the case of ZnO films prepared with a MEA-chelated precursor solution, all films show a strong preferred orientation irrespective of substrate type. This result clearly demonstrates the role of the chelating agent on the crystallographic orientation and crystallization behavior of sol-gel processed ZnO films.