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Room-temperature deposition of flexible transparent conductive Ga-doped ZnO thin films by magnetron sputtering on polymer substrates

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Abstract

Flexible Ga doped ZnO transparent conductive films were prepared on polymer substrates at room temperature by RF magnetron sputtering. The effect of the Ar flow rate is more important than that of r.f. power and sputtering pressure. The dependence of the structural, electrical, optical and adhesive properties of flexible Ga doped ZnO transparent conductive thin films on the Ar flow rate was investigated for the first time. When the Ar flow rate is 40 sccm, the residual stress is changed from compressive stress to tensile stress, indicating the crystallinity of the film is best. And the lowest square resistance of 7.9 Ω/sq. is obtained at the Ar flow rate of 40 sccm. Regardless of the Ar flow rate, the optical transmittance in the visible light of all the films is about 90%. The best adhesive behavior is obtained at the Ar flow rate of 40 sccm.

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Acknowledgements

This work was supported by National Natural Science Foundation of China (Contract no.51302021), Scientific Research Fund of Hunan Provincial Education Department (Contract no. 13C1025), the Hunan provincial Engineering Research Center of Electric transportation and smart distribution network (Changsha University of Science & Technology).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Changsha University of Science and Technology, Changsha, 410114, People’s Republic of China

    Li Gong & Yun-Zhen Liu

  2. Hunan Provincial Engineering Research Center of Electric Transportation and Smart Distribution Network, Changsha University of Science & Technology, Changsha, 410114, People’s Republic of China

    Li Gong

  3. School of Metallurgy and Environment, Central South University, Changsha, 410083, People’s Republic of China

    Fang-Yang Liu & Liang-Xing Jiang

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  1. Li Gong
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  2. Yun-Zhen Liu
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Correspondence to Li Gong or Liang-Xing Jiang.

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Gong, L., Liu, YZ., Liu, FY. et al. Room-temperature deposition of flexible transparent conductive Ga-doped ZnO thin films by magnetron sputtering on polymer substrates. J Mater Sci: Mater Electron 28, 6093–6098 (2017). https://doi.org/10.1007/s10854-016-6286-3

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  • DOI: https://doi.org/10.1007/s10854-016-6286-3

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