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TiO2 thin film based gas sensors for CO-detection

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Abstract

Pure titanium dioxide (TiO2) thin films were deposited and investigated as gas sensors for carbon monoxide (CO) detection. TiO2 thin films were deposited by ultrasonic spray pyrolysis technique, starting from titanium(IV) oxyacetilacetonate, onto soda-lime glass substrates. Structural, morphological, and compositional properties of the TiO2 films were obtained utilizing X-ray diffractometry, energy dispersive X-ray, scanning electron microscopy, and secondary ion mass spectroscopy techniques, respectively. Films deposited above 400 °C were polycrystalline, and its X-ray pattern fit well to the TiO2 anatase structure, and no other phases were detected, whereas films deposited at lower temperatures presented an amorphous structure. The sensitivity of the TiO2 films is analyzed by varying both thickness and deposition temperature. In addition, the sensor response was measured for CO concentrations from 1 to 300 ppm at different operation temperatures, 100, 200, and 300 °C. The highest sensitivity (~ 300) was obtained for TiO2 thin films deposited with the lowest film thickness, at a substrate temperature of 350 °C. The results obtained in this work show that the TiO2 films processed by ultrasonic spray pyrolysis exhibit very promising results for detection of CO.

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Acknowledgements

The technical assistance of A. Palafox, E. Luna, M. A. Luna-Arias, A. Tavira-Fuentes, Velumani Subramaniam and Moises Orduño-Gómez for sample preparation and characterization is thanked. A. Maldonado credits CONACyT for support through 166601 Project.

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Authors and Affiliations

  1. Área académica de Computación y Electrónica, ICBI, Universidad Autónoma del Estado de Hidalgo, Ciudad del Conocimiento, Carretera Pachuca - Tulancingo, Km. 4.5, 56092, Mineral de la Reforma, Hidalgo, Mexico

    Heberto Gómez Pozos

  2. Ingeniería Industrial Escuela Superior Tepeji del Río, Universidad Autónoma del Estado de Hidalgo, Noxtongo, 42855, Tepeji de Ocampo, Hgo, Mexico

    Karthik Tangirala Venkata Krishna

  3. Departamento de Ingeniería Eléctrica-SEES, Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, CINVESTAV-IPN, Apartado postal 14740, 07360, Mexico City, DF, Mexico

    María de la Luz Olvera Amador, Yuriy Kudriavtsev & Arturo Maldonado Alvarez

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  1. Heberto Gómez Pozos
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  2. Karthik Tangirala Venkata Krishna
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  3. María de la Luz Olvera Amador
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Correspondence to Heberto Gómez Pozos.

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Pozos, H.G., Krishna, K.T.V., de la Luz Olvera Amador, M. et al. TiO2 thin film based gas sensors for CO-detection. J Mater Sci: Mater Electron 29, 15829–15837 (2018). https://doi.org/10.1007/s10854-018-9477-2

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  • DOI: https://doi.org/10.1007/s10854-018-9477-2

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