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Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements

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Journal of Russian Laser Research Aims and scope

Abstract

The construction and technical characteristics of the phase interferometric microscope MIM-2.1 are described. With the help of this modulation interferometric microscope, a vertical resolution up to fractions of a nanometer and a lateral resolution up to tens of nanometers are achieved. The results of measurements obtained on samples of different types, such as a column, a step, a flute, and a fragment of a DVD disk, are presented.

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Authors and Affiliations

  1. AMPHORA Labs Co. Ltd., Suite 701, Ul. Presnenskii Val 17, Moscow, 123557, Russia

    V. A. Andreev, K. V. Indukaev, O. K. Ioselev, A. I. Legkii, G. L. Lazarev & D. A. Orlov

Authors
  1. V. A. Andreev
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  2. K. V. Indukaev
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  3. O. K. Ioselev
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  4. A. I. Legkii
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  5. G. L. Lazarev
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  6. D. A. Orlov
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Andreev, V.A., Indukaev, K.V., Ioselev, O.K. et al. Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements. J Russ Laser Res 26, 394–401 (2005). https://doi.org/10.1007/s10946-005-0042-0

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  • DOI: https://doi.org/10.1007/s10946-005-0042-0

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