Abstract
Spectral response characteristics of novel planar GaAs blocked-impurity-band (BIB) detector with the absorption region formed by ion implantation have been investigated. Processing technology and simulation method are described in detail. For obtaining a deep and flat implantation region, four-time-implantation scheme with different implantation energy and dose is proposed. Our results show that the novel planar GaAs BIB detector can response radiations with wavelength range from 165 to 400 μm, corresponding to frequency range from 750 GHz to 1.8 THz, which is perfectly suitable for the security application. An empirical formula is proposed to predict the dependence of spectral width on the depth of absorption region. It is demonstrated that a trade-off between responsivity and dark current has to be made for the optimal depth of absorption region.
Similar content being viewed by others
References
Ando, K., Hoffman, A., Love, P., Toth, A., Anderson, C., Chapman, G., McCreight, C., Ennico, K., McKelvey, M., Mvmurray, R.: Development of Si: As impurity band conduction (IBC) detectors for mid-infrared applications. Proc. SPIE 5074, 648–657 (2003)
Beckmann, J., Marchetti, B., von Chrzanowski, L.S., Ritter, E., Puskar, L., Aziz, E.F., Schade, U.: Optical constants of harmful and highly energetic liquids for application to THz screening systems. IEEE Trans. Terahertz Sci. Technol. 6, 396–407 (2016)
Beeman, J.W., Goyal, S., Reichertz, L.A., Haller, E.E.: Ion-implanted Ge: B far-infrared blocked-impurity-band detectors. Infrared Phys. Technol. 51, 60–65 (2007)
Cardozo, B.L., Haller, E.E., Reichertz, L.A., Beeman, J.W.: Far-infrared absorption in GaAs: Te liquid phase epitaxial films. Appl. Phys. Lett. 83, 3990–3992 (2003)
Cardozo, B.L., Reichertz, L.A., Beeman, J.W., Haller, E.E.: Characterization of liquid phase epitaxial GaAs for blocked-impurity-band far-infrared detectors. Infrared Phys. Technol. 46, 400–407 (2005)
Franke, C., Walther, M., Helm, M., Schneider, H.: Two-photon quantum well infrared photodetectors below 6 THz. Infrared Phys. Technol. 70, 30–33 (2015)
Fujii, G., Ukibe, M., Ohkubo, M.: Improvement of soft X-ray detection performance in superconducting-tunnel-junction array detectoss with close-packed arrangement by three-dimensional structure. Superconduct. Sci. Technol. 28, 104005 (2015)
Gualtieri, R., Battistelli, E.S., Cruciani, A., de Bernardis, P., Biasotti, M., Corsini, D., Gatti, F., Lamagna, L., Masi, S.: Multi-mode TES bolometer optimization for the LSPE-SWIPE instrument. J. Low Temp. Phys. 184, 527–533 (2016)
Guo, N., Hu, W., Chen, X., Wang, L., Lu, W.: Enhanced plasmonic resonant excitation in a grating gated field-effect transistor with supplemental gates. Opt. Express 21, 1606–1614 (2013)
Haegel, N.M.: BIB detector development for the far Infrared: from Ge to GaAs. Proc. SPIE 4999, 182–194 (2003)
Hanaoka, M., Kaneda, H., Oyabu, S., Yamagishi, M., Hattori, Y., Ukai, S., Shichi, K., Wada, T., Suzuki, T., Watanabe, K., Nagase, K., Baba, S., Kochi, C.: Development of blocked-impurity-band type Ge detectors fabricated with the surface-activated wafer bonding method for far-infrared astronomy. J. Low Temp. Phys. 184, 225–230 (2016)
Hu, W., Wang, L., Chen, X., Guo, N., Miao, J., Yu, A., Lu, W.: Room-temperature plasmonic resonant absorption for grating-gate GaN HEMTs in far infrared terahertz domain. Opt. Quantum Electron. 45, 713–720 (2013)
Katterloher, R., Jakob, G., Konuma, M., Krabbe, A., Haegel, N., Samperi, S.A., Beeman, J.W., Haller, E.E.: Liquid phase expitaxy centrifuge for growth of ultra-pure gallium arsenide for far infrared photoconductors. Proc. SPIE 4486, 200–208 (2002)
Knipper, R., Brahm, A., Heinz, E., May, T., Notni, G., Meyer, H.G., Tunnermann, A., Popp, J.: THz absorption in fabric and its impact on body scanning for security application. IEEE Trans. Terahertz Sci. Technol. 5, 999–1004 (2015)
Li, W., Huang, Z., Wang, J., Li, M., Gou, J., Jiang, Y.: Thermal crosstalk simulation and measurement of linear terahertz detector arrays. Infrared Phys. Technol. 73, 73–77 (2015)
Liao, K.S., Li, N., Liu, X.H., Huang, L., Zeng, Q.Y., Zhou, X.H., Li, Z.F.: Ion-implanted Si: P blocked-impurity-band photodetectors for far-infrared and terahertz radiation detection. Proc. SPIE 8909, 890913 (2013)
Liao, K.S., Li, N., Wang, C., Li, L., Jing, Y.L., Wen, J., Li, M.Y., Wang, H., Zhou, X.H., Li, Z.F.: Extended mode in blocked impurity band detectors for terahertz radiation detection. Appl. Phys. Lett. 14, 143501 (2014)
Petroff, M.D., and Stapelbroek, M.G.: Blocked Impurity Band Detectors. US Patent. No.4,568,960 (1986)
Qiu, W.C., Hu, W.D., Chen, L., Lin, C., Cheng, X.A., Chen, X.S., Lu, W.: Dark current transport and avalanche mechanism in HgCdTe electron-avalanche photodiodes. IEEE Trans. Electron Devices 62, 1926–1931 (2015)
Rabanus, D., Graf, U.U., Philipp, M., Ricken, O., Stutzki, J., Vowinkel, B., Wiedner, M.C., Walther, C., Fischer, M., Faist, J.: Phase locking of a 1.5 THz quantum cascade laser and use as a local oscillator in a heterodyne HEB receiver. Opt. Express 17, 1159–1168 (2009)
Reichertz, L.A., Beeman, J.W., Cardozo, B.L., Haegel, N.M., Haller, E.E., Jakob, G., Katterloher, R.: GaAs BIB photodetector development for far-infrared astronomy. Proc. SPIE 5543, 231–238 (2004)
Shishido, H., Miyajima, S., Narukami, Y., Oikawa, K., Harada, M., Oku, T., Arai, M., Hidaka, M., Fjimaki, A., Ishida, T.: Neutron detection using a current biased kinetic inductance detector. Appl. Phys. Lett. 107, 232601 (2015)
Stillman, G.E., Wolfe, C.M., Melngailis, I., Parker, C.D., Tannenwald, P.E., Dimmock, J.O.: Far-infrared photoconductivity in high purity epitaxial GaAs. Appl. Phys. Lett. 13, 83–84 (1968)
Sturge, M.D.: Optical absorption of gallium arsenide between 0.6 and 2.75 eV. Phys. Rev. 127, 768–773 (1962)
Synopsys: Sentaurus Device User Guide. Synopsys Inc., USA (2008)
Wang, X.D., Hu, W.D., Chen, X.S., Lu, W.: The study of self-heating and hot-electron effects for AlGaN/GaN double-channel HEMTs. IEEE Trans. Electron Devices 59, 1393–1401 (2012)
Wang, X.D., Hu, W.D., Pan, M., Hou, L.W., Xie, W., Xu, J.T., Li, X.Y., Chen, X.S., Lu, W.: Study of gain and photoresponse characteristics for back-illuminated separate absorption and multiplication GaN avalanche photodiodes. J. Appl. Phys. 115, 013103 (2014)
Wang, W.D., Wang, B.B., Hou, L.W., Xie, W., Chen, X.Y., Pan, M.: Design consideration of GaAs-based blocked-impurity-band detector with the absorbing layer formed by ion implantation. Opt. Quantum Electron. 47, 1347–1355 (2015)
Wang, B.B., Wang, X.D., Chen, X.Y., Hou, L.W., Xie, W., Pan, M.: Acquisition of optimal operating temperature for epitaxial Si: P blocked-impurity-band detector based on temperature-dependent characteristics investigation. Opt. Quantum Electron. 48, 126 (2016a)
Wang, X.D., Wang, B.B., Hou, L.W., Xie, W., Chen, X.Y., Pan, M.: Analysis of dark current spectral response mechanisms for Si-based block-impurity-band detectors operating at terahertz regime. Opt. Quantum Electron. 48, 100 (2016b)
Acknowledgments
This work was supported by the National Natural Science Foundation of China (Grant No. 61404120).
Author information
Authors and Affiliations
Corresponding author
Additional information
This article is part of the Topical Collection on Numerical Simulation of Optoelectronic Devices 2016.
Guest edited by Yuh-Renn Wu, Weida Hu, Slawomir Sujecki, Silvano Donati, Matthias Auf der Maur and Mohamed Swillam.
Rights and permissions
About this article
Cite this article
Wang, X., Wang, B., Chen, Y. et al. Spectral response characteristics of novel ion-implanted planar GaAs blocked-impurity-band detectors in the terahertz domain. Opt Quant Electron 48, 518 (2016). https://doi.org/10.1007/s11082-016-0778-5
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11082-016-0778-5