Skip to main content
SpringerLink
Log in

The Mg doping GZO thin films for optical and electrical application by using RF magnetron sputtering

  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

An investigation is performed into the optical and electrical application of Mg doping GZO thin films deposited on glass substrates using a radio frequency magnetron sputtering (RF-sputtering) system with working pressures ranging from 3 to 9 mtorr. The X-ray diffraction patterns show that the MGZO films all exhibit a strong (103) preferential orientation. Moreover, the films show an average optical transmittance of approximately 85% in the visible light range. The electrical resistivity increases with an increasing working pressure. Thus, the optimal resistivity (1.9 × 10−3 Ω-cm) is obtained at the lowest working pressure of 3 mtorr and is the result of an improved crystalline structure. The results show the Mg doping GZO can be applied in the optical elements.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  • Abrarov, S.M., Yuldashev, S.U., Lee, S.B., Kang, T.W.: Green photoluminescence suppression in ZnO embedded in porous opal. Jpn. J. Appl. Phys. 43, 6101–6103 (2004)

    Article  ADS  Google Scholar 

  • Agura, H., Suzuki, A., Matsushita, T., Aoki, T., Okuda, M.: Low resistivity transparent conducting Al-doped ZnO films prepared by pulsed laser deposition. Thin Solid Films 445, 263–367 (2003)

    Article  ADS  Google Scholar 

  • Ahn, B.D., Oh, S.H., Lee, C.H., Kim, G.H., Kim, H.J., Lee, S.Y.: Influence of thermal annealing ambient on Ga-doped ZnO thin films. J. Cryst. Growth 309, 128–133 (2007)

    Article  ADS  Google Scholar 

  • Chen, T.H., Chen, T.Y.: Effects of annealing temperature on properties of Ti–Ga–doped ZnO films deposited on flexible substrates. Nanomaterials 5, 1831–1839 (2015)

    Article  ADS  Google Scholar 

  • Chen, T.H., Jiang, B.L.: Optical and electronic properties of Mo:ZnO by using RF magnetron sputtering under different process parameters. Opt. Quant. Electron. 48, 1–9 (2016)

    Article  Google Scholar 

  • Fan, X.M., Lian, J.S., Guo, Z.X., Lu, H.J.: ZnO thin film formation on Si (1 1 1) by laser ablation of Zn target in oxygen atmosphere. J. Cryst. Growth 279, 447–453 (2005)

    Article  ADS  Google Scholar 

  • Goyal, A., Yadav, B.S., Thakur, O.P., Kapoor, A.K., Muralidharan, R.: Effect of annealing on b-Ga2O3 film grown by pulsed laser deposition technique. J. Alloys Compd. 583, 214–219 (2014)

    Article  Google Scholar 

  • Kato, H., Sano, M., Miyamoto, K., Yao, T.: Growth and characterization of Ga-doped ZnO layers on a-plane sapphire substrates grown by molecular beam epitaxy. J. Cryst. Growth 538, 237–239 (2002)

    Google Scholar 

  • Kim, S., Lee, W.I., Lee, E.H., Hwang, S.K., Lee, C.: Dependence of the resistivity and the transmittance of sputter-deposited Ga-doped ZnO films on oxygen partial pressure and sputtering temperature. J. Mater. Sci. 42, 4845–4849 (2007)

    Article  ADS  Google Scholar 

  • Kim, D., Yun, I., Kim, H.: Fabrication of rough Al doped ZnO films deposited by low pressure chemical vapor deposition for high efficiency thin film solar cells. Curr. Appl. Phys. 10, S459–S462 (2010)

    Article  ADS  Google Scholar 

  • Lemlikchi, S., Abdelli-Messaci, S., Lafane, S., Kerdja, T., Guittoum, A., Saad, M.: Study of structural and optical properties of ZnO films grown by pulsed laser deposition. Appl. Surf. Sci. 256, 5650–5655 (2010)

    Article  ADS  Google Scholar 

  • Mahroug, A., Boudjadar, S., Hamrit, S., Guerbous, L.: Structural, optical and photocurrent properties of undoped and Al-doped ZnO thin films deposited by sol–gel spin coating technique. Mater. Lett. 134, 248–251 (2014)

    Article  Google Scholar 

  • Nakagomi, S., Kokubun, Y.: Crystal orientation of β-Ga2O3 thin films formed on c-plane and a-plane sapphire substrate. J. Cryst. Growth 349, 12–18 (2012)

    Article  ADS  Google Scholar 

  • Okada, T., Suehiro, J.: Synthesis of nano-structured materials by laser-ablation and their application to sensors. Appl. Surf. Sci. 253, 7840–7847 (2007)

    Article  ADS  Google Scholar 

  • Park, W.J., Shin, H.S., Ahn, B.D., Kim, G.H., Lee, S.M., Kim, K.H., Kim, H.J.: Investigation on doping dependency of solution-processed Ga-doped ZnO thin film transistor. Appl. Phys. Lett. doi:10.1063/1.2976309 (2008)

    Google Scholar 

  • Shan, F., Kim, B.I., Liu, G.X., Liu, Z.F., Sohn, J.Y., Lee, W.J., Shin, B.C., Yu, Y.S.: Blueshift of near band edge emission in Mg doped ZnO thin films and aging. J. Appl. Phys. 95, 4772–4776 (2004)

    Article  ADS  Google Scholar 

  • Shin, S.W., Kim, I.Y., Lee, G.H., Agawane, G.L., Mohokar, A.V., Heo, G.S., Kim, J.H., Lee, J.Y.: Design and growth of quaternary Mg and Ga codoped ZnO thin films with transparent conductive characteristics. Cryst. Growth Des. 11, 4819–4824 (2011)

    Article  Google Scholar 

  • Shrestha, P.K., Chun, Y.T., Chu, D.: A high-resolution optically addressed spatial light modulator based on ZnO nanoparticles. Light: Sci. Appl. 4, e259. doi:10.1038/lsa.2015.32 (2015)

    Article  Google Scholar 

  • Su, Y.H., Ke, Y.F., Cai, S.L., Yao, Q.: Surface plasmon resonance of layer-by-layer gold nanoparticles induced photoelectric current in environmentally-friendly plasmon-sensitized solar cell. Light: Sci. Appl. 1, e14. doi:10.1038/lsa.2012.14 (2012)

    Article  Google Scholar 

  • Tsay, C.Y., Cheng, H.C., Tung, Y.T., Tuan, W.H., Lin, C.K.: Effect of Sn-doped on microstructural and optical properties of ZnO thin films deposited by sol–gel method. Thin Solid Films 517, 1032–1036 (2008)

    Article  ADS  Google Scholar 

  • Webb, J.B., Williams, D.F., Buchanan, M.: Transparent and highly conductive films of ZnO prepared by rf reactive magnetron sputtering. Appl. Phys. Lett. 39, 640–642 (1981)

    Article  ADS  Google Scholar 

  • Yang, W., Vispute, R.D., Choopun, S., Sharma, R.P., Venkatesan, T., Shen, H.: Ultraviolet photoconductive detector based on epitaxial Mg0.34Zn0.66O thin films. Appl. Phys. Lett. 78, 2787–2789 (2001)

    Article  ADS  Google Scholar 

  • Yu, C.C., Yang, K.S., Chang, H., Lee, J.S., Lai, J.Y., Chuang, P.Y., Andrew Huang, J.C., Sun, A.C., Wu, F.C., Cheng, H.L.: Preparation and characterization of In2O3 films with (111) preferred orientation. Vacuum 102, 63–66 (2014)

    Article  ADS  Google Scholar 

  • Zhang, Z.G., Zhou, F., Wei, X.Q., Liu, M., Sun, G., Chen, C.S., Xe, C.S., Zhuang, H.Z., Man, B.Y.: Effect of oxygen pressures on pulsed laser deposition of ZnO films. Phys. E 39, 253–257 (2007)

    Article  Google Scholar 

Download references

Acknowledgements

The authors gratefully acknowledge the financial support provided to this study by the Ministry of Science and Technology, R.O.C., under Contract No. MOST 105-2221-E-151-026.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan

    Tao-Hsing Chen & Chia-Lin Yang

Authors
  1. Tao-Hsing Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chia-Lin Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Tao-Hsing Chen.

Additional information

This article is part of the Topical Collection on Photonic Science and Engineering on the Micro/Nano Scale.

Guest edited by Yen-Hsun Su, Lei Liu, Yiting Yu and Yikun Liu.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Chen, TH., Yang, CL. The Mg doping GZO thin films for optical and electrical application by using RF magnetron sputtering. Opt Quant Electron 48, 533 (2016). https://doi.org/10.1007/s11082-016-0808-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11082-016-0808-3

Keywords

Search

Navigation