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Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1− x Ti x )N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining

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Abstract

The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-Al1-xTi x N/a-Si3N4 coatings in which the nanocrystals of the Al-rich solid solution with the fcc crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAl x )N coatings.

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Authors and Affiliations

  1. SHM Ltd., CZ-78803, Novy Malin 266, Czech Republic

    M. Jilek & P. Holubar

  2. PLATIT AG, Moosstr. 68, CH-2540, Grenchen, Switzerland

    T. Cselle & M. Morstein

  3. Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstr. 4, D-85747, Garching/Munich, Germany

    M. G. J. Veprek-Heijman & Stan Veprek

Authors
  1. M. Jilek
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  2. T. Cselle
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  3. P. Holubar
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  4. M. Morstein
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  5. M. G. J. Veprek-Heijman
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  6. Stan Veprek
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Correspondence to Stan Veprek.

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Jilek, M., Cselle, T., Holubar, P. et al. Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1− x Ti x )N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining. Plasma Chem Plasma Process 24, 493–510 (2004). https://doi.org/10.1007/s11090-004-7929-3

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  • DOI: https://doi.org/10.1007/s11090-004-7929-3

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