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Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing

  • Articles / Electronics Physics
  • Published:
Chinese Science Bulletin

Abstract

ZnO microcrystals are synthesized through a facile solution method and characterized by field-emission scanning electron microscopy, transmission electron microscopy, selected area electron diffraction and X-ray diffraction. The ethanol sensing properties of these microcrystals are investigated by spin-coating them on a silicon substrate with Pt electrodes to fabricate a micro-structure sensor. The sensitivity is up to 8 when the sensor is exposed to 50 ppm ethanol, and the response time and recovery time are 10 s and 20 s, respectively. A contact-controlled model is established to explain the sensing properties of the microcrystals, which provides another approach to realize high-performance gas sensors.

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Authors and Affiliations

  1. College of Physics, Jilin University, Changchun, 130012, China

    Li Liu, ShouChun Li, LianYuan Wang & YunXia Tian

  2. National Laboratory of Superhard Materials, Jilin University, Changchun, 130012, China

    Li Liu, ShouChun Li, LianYuan Wang & YunXia Tian

  3. State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, 130012, China

    Tong Zhang

Authors
  1. Li Liu
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  2. Tong Zhang
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  3. ShouChun Li
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  4. LianYuan Wang
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  5. YunXia Tian
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Corresponding author

Correspondence to Li Liu.

Additional information

Supported by the National Natural Science Foundation of China (Grant No. 10672139)

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Liu, L., Zhang, T., Li, S. et al. Micro-structure sensors based on ZnO microcrystals with contact-controlled ethanol sensing. Chin. Sci. Bull. 54, 4371–4375 (2009). https://doi.org/10.1007/s11434-009-0662-9

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  • DOI: https://doi.org/10.1007/s11434-009-0662-9

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