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Structural, Mechanical and Erosion Properties of Yttrium Oxide Coatings by Axial Suspension Plasma Spraying for Electronics Applications

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Abstract

Yttrium oxide (Y2O3) coatings have been prepared by axial suspension plasma spraying with fine powders. It is clarified that the coatings have high hardness, low porosity, high erosion resistance against CF4 -containing plasma and retention of smooth eroded surface. This suggests that the axial suspension plasma spraying of Y2O3 is applicable to fabricating equipment for electronic devices, such as dry etching. Surface morphologies of the slurry coatings with splats are similar to conventional plasma-sprayed Y2O3 coatings, identified from microstructural analysis. Dense coating structures with no lamellar boundaries have been seen, which is apparently different from the conventional coatings. It has also been found that crystal structure of the suspension coatings mainly composed of metastable monoclinic phase, whereas the powders and the conventional plasma spray coatings have stable cubic phase. Mechanism of coating formation by plasma spraying with fine powder slurries is discussed based on the results.

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Authors and Affiliations

  1. Thermal Spray Materials Department, Fujimi Incorporated, Kakamigahara, Gifu, Japan

    Junya Kitamura, Hiroaki Mizuno & Kazuto Sato

  2. Northwest Mettech Corporation, 467 Mountain Highway, North Vancouver, BC, Canada

    Zhaolin Tang & Alan Burgess

Authors
  1. Junya Kitamura
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  2. Zhaolin Tang
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  3. Hiroaki Mizuno
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  4. Kazuto Sato
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  5. Alan Burgess
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Correspondence to Junya Kitamura.

Additional information

This article is an invited paper selected from presentations at the 2010 International Thermal Spray Conference and has been expanded from the original presentation. It is simultaneously published in Thermal Spray: Global Solutions for Future Applications, Proceedings of the 2010 International Thermal Spray Conference, Singapore, May 3-5, 2010, Basil R. Marple, Arvind Agarwal, Margaret M. Hyland, Yuk-Chiu Lau, Chang-Jiu Li, Rogerio S. Lima, and Ghislain Montavon, Ed., ASM International, Materials Park, OH, 2011.

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Kitamura, J., Tang, Z., Mizuno, H. et al. Structural, Mechanical and Erosion Properties of Yttrium Oxide Coatings by Axial Suspension Plasma Spraying for Electronics Applications. J Therm Spray Tech 20, 170–185 (2011). https://doi.org/10.1007/s11666-010-9585-x

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