Abstract
We report the conducting and transparent In doped ZnO films fabricated by a homemade chemical spray pyrolysis system (CSPT). The effect of In concentration on the structural, morphological, electrical and optical properties have been studied. These films are found to show (0 0 2) preferential growth at low indium concentrations. An increase in In concentration causes a decrease in crystalline quality of films as confirmed by X-ray diffraction technique which leads to the introduction of defects in ZnO. Indium doping also significantly increased the electron concentrations, making the films heavily n type. However, the crystallinity and surface roughness of the films decreases with increase in indium doping content likely as a result of the formation of smaller grain size, which is clearly displayed in AFM images. Typical optical transmittance values in the order of (80%) were obtained for all films. The lowest resistivity value of 0.045 Ω-m was obtained for film with 5% indium doping.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Ables A 1992 Optical properties of solids (Amsterdam: North Holland) p. 32
Assuncao V, Fortunato E, Marques A, Aguas H, Ferreira I, Costa M E V and Martins R 2003 Thin Solid Films 427 401
Ataev B M, Bagamadova A M, Djabrailov A M, Mamedo V V and Rabadanov R A 1995 Thin Solid Films 260 19
Ataev B M, Bagamadova A M, Mamedov V V, Omaev A K and Rabadanov M R 1999 J. Cryst. Growth 198–199 1222
Barret C S and Massalski T B 1980 Structure of metals (Oxford: Pergamon Press)
Cao Y, Miao L, Tanemura S, Tanemura M, Kuno Y, Hayashi Y and Mori Y 2006 Jpn J. Appl. Phys. 45 1623
Cembrero J, Elmanouni A, Hartiti B, Mollar M and Marí B 2004 Thin Solid Films 198 451
Chen L L, He H P, Ye Z Z, Zeng Y J, Lu J G, Zhao B H and Zhu L P 2006 Chem. Phys. Lett. 420 358
Chen M, Pei Z, Xi W, Sun C and Wen L 2001 Mater. Res. Soc. Symp. Proc. 666 F.1.2
Godbole B, Badera N, Shrivastava S B, Ganesan V and Jain D 2007 Surf. Rev. & Letts 14 1
Goyal D J, Agashe C, Takwale M G, Bhide V G and Mahamuni Kulkarni S K 1993 J. Mater. Res. 8 1052
Kato H, Sano M, Miyamoto K and Yao T 2002 J. Cryst. Growth 538 237
Kim Dong Hun, Cho Nam Gyu and Kim Ho Gi 2007 J. Electrochem. Soc. 154 H939
Ko H J, Chen Y F, Hong S K, Wenisch H, Yao T and Look D C 2000 Appl. Phys. Lett. 77 3761
Lee J-H and Park B-O 2004 Mater. Sci. Eng. B106 242
Lee J H, Ko K H and Park B O 2003 J. Cryst. Growth 247 119
Lin S-S, Huang J-L and Lii D-F 2004 Surf. Coat. Technol. 176 173
Liu Z F, Shan F K, Li Y X, Shin B C and Yu Y S 2003 J. Cryst. Growth 259 130
Ma J Y and Lee S C 2000 J. Mater. Sci., Mater. Electron. 11 35
Major S, Banerjee A, Chopra K L and Nagpal K C 1986 Thin Solid Films 143 19
Miki-Yoshida M, Paraguay-Delgado F, Estrada-Lopez W and Andrade E 2000 Thin Solid Films 376 99
Minami T, Nanto H and Takata S 1984 Jpn J. Appl. Phys. 23 L280
Myong S Y, Baik S J, Lee C H, Cho W Y and Lim K S 1997 Jpn J. Appl. Phys. 36 L1078
Ozgur U, Alivov Ya L, Liu C, Teke A, Reshchikov M K, Dogan S, Ayrutin V, Cho S -J and Morkoc H 2005 J. Appl. Phys. 98 041301
Pankove J I 1965 Phys. Rev. 140 A2059
Rathneesh Kumar P M, Kartha C S, Vijayakumar K P, Abe T, Kashiwaba Y, Singh F and Awasthi D K 2005 Semicond. Sci. Technol. 20 120
Singh A V, Kumar M, Mehra R M, Wakanaria A and Yoshida A 2001 J. Indian Inst. Sci. 81 527
Song D, Denborg P W, Chin W and Aberle A G 2002 Sol. Energy Mater. Sol. Cells 73 1
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Singh, G., Shrivastava, S.B., Jain, D. et al. Effect of indium doping on zinc oxide films prepared by chemical spray pyrolysis technique. Bull Mater Sci 33, 581–587 (2010). https://doi.org/10.1007/s12034-010-0089-6
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12034-010-0089-6