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Design and fabrication of synthetic air-jet micropump

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Abstract

In this paper, we propose a synthetic jet-type micropump for supplying air. Synthetic jet actuators usually include a small single pumping cavity, inlet/outlet channels, and a Lead zirconate titanate(PZT) membrane that exerts the pumping pressure. To determine the optimum design parameters of the air pump, a numerical analysis was carried out by varying its geometry. The optimized air pump was fabricated by replicating PDMS parts from silicon masters patterned by the deep RIE process. The size of the fabricated micropump was 16 × 13 × 3 mm3. In order to control the frequency of the PZT membrane and reduce the controller size and power consumption, an SP4423 microchip was used. At a pumping frequency of 80 Hz, a flow rate of 9.5 cc/min, pumping pressure of 438 Pa, and power consumption less than 0.15 mW were achieved.

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Abbreviations

D:

chamber diameter

d1 :

diffuser inlet width

d3 :

air inlet channel width

d5 :

air outlet channel width

H:

chamber height

d2 :

diffuser outlet width

d4 :

air inlet gate length

dh:

diffuser length

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Authors and Affiliations

  1. Department of Mechanical and Mechatronics Engineering, Kangwon National University, 1 Kangwondaehakgil, Chuncheon, South Korea, 200-701

    Jong Phil Choi, Kwang Soo Kim, Young Ho Seo & Byeong Hee Kim

Authors
  1. Jong Phil Choi
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  2. Kwang Soo Kim
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  3. Young Ho Seo
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  4. Byeong Hee Kim
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Correspondence to Byeong Hee Kim.

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Choi, J.P., Kim, K.S., Seo, Y.H. et al. Design and fabrication of synthetic air-jet micropump. Int. J. Precis. Eng. Manuf. 12, 355–360 (2011). https://doi.org/10.1007/s12541-011-0046-3

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  • DOI: https://doi.org/10.1007/s12541-011-0046-3

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