Abstract
A direct patterning for a barrier rib using the roll-imprinting process is getting more interests in display manufacturing fields. Master roll patterning is one of the important issues in the roll-imprinting process. In this study, a novel fabrication process of micro-patterning on a roller surface by applying the photolithography process is studied. Because the roller surface was a cylindrical shape, the designed pattern was made by using a film mask. Special jigs and roll holder were designed and used for the photolithography on the roll substrate. The roll patterning results showed a feasibility of the proposed method for the photolithography on the roll’s surface.
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Kim, S.L., Kim, G.M. Micropatterning on roll surface using photo-lithography processes. Int. J. Precis. Eng. Manuf. 12, 763–768 (2011). https://doi.org/10.1007/s12541-011-0101-0
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DOI: https://doi.org/10.1007/s12541-011-0101-0