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Chemo-mechanical manufacturing of fused silica by combining ultrasonic vibration with fixed-abrasive pellets

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An Erratum to this article was published on 02 May 2014

Abstract

Vibration-assisted grinding, in which harder abrasives than materials to be machined are employed, has been a viable and effective approach to increasing material removal rate (MRR) and/or reducing surface roughness of ground surfaces. We transfer this ideology to fused silica polishing by incorporating ultrasonic vibration into recently developed fixed-abrasive pellets in an attempt to enhance MRR and/or to improve manufactured surface quality. A prototype ultrasonic vibrator, the heart of the polishing head, was designed and the related experimental work was performed on an in-house built setup in conjunction with the constructed head. The vibrator is devised for the generation of 2-D tool path despite using only one actuator in lieu of two actuators in conventional 2-D ultrasonic machining systems. We then combined the ultrasonic vibration with fixed abrasive polishing pellets to machine fused silica glass. Machining experiments reveal that MRR is considerably increased up to >50% upon the introduction of ultrasonic vibration (UV) whilst surface roughness is not degraded appreciably. It was also noted that a overwhelmingly greater deal of polishing debris was dispelled during ultrasonic vibration assisted polishing than conventional bound-abrasive polishing, which may account for the greater MRR in UV assisted polishing.

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Authors and Affiliations

  1. Department of Machine Intelligence & Systems Engineering, Akita Prefectural University, Yurihonjo, Japan, 015-0055

    Yaguo Li, Yongbo Wu, Masakazu Fujimoto & Shoichi Sasaki

  2. Fine Optical Engineering Research Center, Chengdu, China, 610041

    Yaguo Li, Jian Wang & Qiao Xu

  3. Department of Intelligent Systems Engineering, Ibaraki University, Hitachi, Japan, 316-8511

    Libo Zhou

  4. Tokyo Diamond Tools Mfg. Co., Ltd., Shibata, Japan, 989-1302

    Masaaki Kemmochi

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  1. Yaguo Li
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  2. Yongbo Wu
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Correspondence to Yaguo Li.

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An erratum to this article is available at http://dx.doi.org/10.1007/s12541-014-0423-9.

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Li, Y., Wu, Y., Zhou, L. et al. Chemo-mechanical manufacturing of fused silica by combining ultrasonic vibration with fixed-abrasive pellets. Int. J. Precis. Eng. Manuf. 13, 2163–2172 (2012). https://doi.org/10.1007/s12541-012-0287-9

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