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Investigation of localized heating characteristics in selective ultrasonic imprinting

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Abstract

Ultrasonic imprinting is a patterning technology in which ultrasonic vibration energy is used to soften the surface of thermoplastic polymer to allow the formation of micropatterns. Compared with other patterning technologies, ultrasonic imprinting has the advantages of short cycle time and low energy consumption. This study deals with the selective ultrasonic imprinting process, which provides higher flexibility in developing versatile micropatterns. Selective ultrasonic imprinting uses a profiled mask film by which ultrasonic waves are transferred from an ultrasonic horn to a target polymer film. The target polymer film is locally softened in the regions in contact with the mask film, so that micropatterns can be selectively replicated in these regions. In this study, this localized heating mechanism is numerically investigated through structural-thermal-coupled finite element analysis, by effectively connecting transient structural and heat transfer analyses. This coupled simulation was performed to investigate the localized heating mechanism of the selective imprinting using an E-shaped mask, and then compared with experimental findings. Micropattern replication was then performed using an arbitrarily shaped logo, with which differentiation of optical transparency could be obtained.

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References

  1. Sackmann, J., Burlage, K., Gerhardy, C., Memering, B., Liao, S., and Schomburg, W., “Review on Ultrasonic Fabrication of Polymer Micro Devices,” Ultrasonics, Vol. 56, pp. 189–200, 2015.

    Article  Google Scholar 

  2. Mekaru, H., Goto, H., and Takahashi, M., “Development of Ultrasonic Micro Hot Embossing Technology,” Microelectronic Engineering, Vol. 84, No. 5, pp. 1282–1287, 2007.

    Article  Google Scholar 

  3. Chu, W.-S., Kim, C.-S., Lee, H.-T., Choi, J.-O., Park, J.-I., et al., “Hybrid Manufacturing in Micro/Nano Scale: A Review,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 1, pp. 75–92, 2014.

    Article  Google Scholar 

  4. Chang, C.-Y. and Yu, C.-H., “A Basic Experimental Study of Ultrasonic Assisted Hot Embossing Process for Rapid Fabrication of Microlens Arrays,” Journal of Micromechanics and Microengineering, Vol. 25, No. 2, Paper No. 025010, 2015.

    Google Scholar 

  5. Michaeli, W., Kamps, T., and Hopmann, C., “Manufacturing of Polymer Micro Parts by Ultrasonic Plasticization and Direct Injection,” Microsystem Technologies, Vol. 17, No. 2, pp. 243–249, 2011.

    Article  Google Scholar 

  6. Sacristan, M., Planta, X., Morell, M., and Puiggali, J., “Effects of Ultrasonic Vibration on the Micro-Molding Processing of Polylactide,” Ultrasonics Sonochemistry, Vol. 21, No. 1, pp. 376–386, 2014.

    Article  Google Scholar 

  7. Mekaru, H. and Takahashi, M., “Ultrasonic Nanoimprint on Poly (Ethylene Terephthalate) at Room Temperature,” Japanese Journal of Applied Physics, Vol. 47, No. 6S, pp. 5178–5184, 2008.

    Article  Google Scholar 

  8. Seo, Y.-S. and Park, K., “Direct Patterning of Micro-Features on a Polymer Substrate using Ultrasonic Vibration,” Microsystem Technologies, Vol. 18, No. 12, pp. 2053–2061, 2012.

    Article  Google Scholar 

  9. Jung, W. and Park, K., “Selective Ultrasonic Imprinting for Micropattern Replication on Predefined Area,” Ultrasonics, Vol. 54, No. 6, pp. 1495–1503, 2014.

    Article  MathSciNet  Google Scholar 

  10. Lee, H.-J. and Park, K., “Development of Composite Micro-Patterns on Polymer Film using Repetitive Ultrasonic Imprinting,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 4, pp. 341–345, 2014.

    Article  Google Scholar 

  11. Park, J. H., Lee, K. Y., and Park, K., “Coupled Numerical Analysis to Investigate the Heating Mechanism of Ultrasonic Imprint Lithography,” Ultrasonics, Vol. 60, pp. 96–102, 2015.

    Article  Google Scholar 

  12. Nonhof, C. J. and Luiten, G. A., “Estimates for Process Conditions during the Ultrasonic Welding of Thermoplastics,” Polymer Engineering & Science, Vol. 36, No. 9, pp. 1177–1183, 1996.

    Article  Google Scholar 

  13. Acquasanta, F., Berti, C., Colonna, M., Fiorini, M., and Karanam, S., “Study of Glow Wire Ignition Temperature (GWIT) and Comparative Tracking Index (CTI) Performances of Engineering Thermoplastics and Correlation with Material Properties,” Polymer Degradation and Stability, Vol. 96, No. 4, pp. 566–573, 2011.

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, 232, Gongneung-ro, Nowon-gu, Seoul, 139-743, South Korea

    Woosin Jung, Hyun-Joong Lee & Keun Park

  2. FAB Equipment Division, SEMES Co. Ltd., 77, 4sandan 5-gil, Jiksan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, 331-814, South Korea

    Woosin Jung

Authors
  1. Woosin Jung
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  2. Hyun-Joong Lee
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  3. Keun Park
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Correspondence to Keun Park.

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Jung, W., Lee, HJ. & Park, K. Investigation of localized heating characteristics in selective ultrasonic imprinting. Int. J. Precis. Eng. Manuf. 16, 1999–2004 (2015). https://doi.org/10.1007/s12541-015-0260-5

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  • DOI: https://doi.org/10.1007/s12541-015-0260-5

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