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Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems

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Abstract

This paper proposes a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Incorporating an electromagnetic force actuator, the 3-DOF suspension mechanism provides a controlled loading force. For reasons of the thermal and mechanical stability, a triangular flexure structure is utilized to support the stylus. The stiffness matrix method is used to establish the analytical stiffness model of the 3-DOF suspension mechanism. Considering the 3-DOF suspension mechanism as a 3-DOF lumped-mass-spring system, the dynamic model is established. Finite element analysis (FEA) is used to validate the established static and dynamic models of the 3-DOF suspension mechanism. A prototype is fabricated and experimental tests are carried out to characterize the mechanism’s performance. The results show that the 3-DOF suspension mechanism provides a controlled force in a range of up to 10 mN and has a working range in excess of 10 μm with a first natural frequency of 342 Hz in Z axis, indicating good capability for multi-function measurements at the micro/nano scale.

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Authors and Affiliations

  1. School of Mechanical Engineering, Tianjin University, Tianjin, 300072, China

    Jia Tian, Yanling Tian, Zhiyong Guo, Fujun Wang & Dawei Zhang

  2. School of Engineering, University of Warwick, Coventry, CV4 7AL, UK

    Yanling Tian & Xianping Liu

  3. Department of Mechanical and Aerospace Engineering, Monash University, Clayton, VIC3800, Australia

    Bijian Shirinzadeh

Authors
  1. Jia Tian
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  2. Yanling Tian
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  3. Zhiyong Guo
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  4. Fujun Wang
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  5. Dawei Zhang
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  6. Xianping Liu
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  7. Bijian Shirinzadeh
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Correspondence to Yanling Tian.

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Tian, J., Tian, Y., Guo, Z. et al. Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Int. J. Precis. Eng. Manuf. 17, 1415–1423 (2016). https://doi.org/10.1007/s12541-016-0167-9

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  • DOI: https://doi.org/10.1007/s12541-016-0167-9

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