Abstract
In this study a palladium nanoparticles-gate MOS capacitor hydrogen sensor with Pd/SiO2/Si structure has been fabricated. The palladium nanoparticles by chemical method are synthesized and then characterized by transmission electron microscope (TEM), X-ray diffraction (XRD) and UV-VIS spectrum. Also, the preferred orientation and grain size of the palladium nanoparticles have been studied. Hydrogen absorption and desorption of the palladium nanoparticles at the low and high pressure and as function of time have been investigated. The sensing mechanism of the hydrogen detection by MOS capacitor sensor has been explained and theoretical and experimental results have been compared. At 287 K, compared to another Pd MOS capacitor hydrogen sensor and ultrathin Pd MOS capacitor, the palladium nanoparticles gate MOS capacitor showed much faster response and recovery speed. The time interval for reaching to 95% of the steady state signal magnitude (t95%) for 1% and 2% hydrogen in nitrogen were 2 s and 1.5 s respectively. The time interval for recovery transients from 95% to 10% of steady state signal magnitude (t10%) for 1% and 2% hydrogen in nitrogen were 10 s and 11 s respectively. The presented sensor illustrates a designing of hydrogen detectors with very fast response and recovery speed.
Similar content being viewed by others
References
M. N. Carcassi and F. Fineschi, Energy 30, 1439 (2005).
R. Ramachandran and R. K. Menon, Int. J. Hydrogen Energy 23, 593 (1998).
T. A. Czuppon, S. A. Knez, and D. S. Newsome, Hydrogen. Kirk-Othmer Encyclopedia of Chemical Technology (J. I. Kroschwitz and M. Howe-Grant, Eds.), 13, p. 884, John Wiley and Sons, New York, USA (1996).
W. J. Buttner, M. B. Post, R. Burgess, and C. Rivkin, Int. J. Hydrogen Energy 36, 2462 (2011).
L. Boon-Brett, J. Bousek, G. Black, P. Moretto, P. Castello, T. Hubert, and U. Banach, Int. J. Hydrogen Energy 35, 373 (2010).
T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sensor. Actuat. B-Chem. 157, 329 (2011).
I. Lundstrom, M. Shivaraman, M. Svensson, and L. Lundkvist, Appl. Phys. Lett. 26, 55 (1975).
I. Lundstrom, M. Shivaraman, and M. Svensson, J. Appl. Phys. 46, 3876 (1975).
I. Lundstrom, Sensor. Actuator. 1, 403 (1981).
E. Lee, J. Lee, J. Noh, W. Kim, T. Lee, S. Maeng, and W. Lee, Int. J. Hydrogen Energy 37, 14702 (2012).
S. Linke, M. Dallmer, R. Werner, and W. Moritz, Int. J. Hydrogen Energy 37, 17523 (2012).
P. Pandey, J. Srivastava, V. Mishra, and R. Dwivedi, Solid State Sci. 11, 1370 (2009).
C. Lu, Z. Chen, and K. Saito, Sensor. Actuat. B-Chem. 122, 556 (2007).
F. A. Lewis, The Palladium Hydrogen System, Academic press, New York, USA (1967).
L. Fekri Aval, S. M. Elahi, E. Darabi, and S. A. Sebt, Sensor. Actuat. B-Chem. 216, 367 (2015).
M. Ramanathan, G. Skudlarek, H. H. Wang, and S. B. Darling, Nanotechnology 21, 125501 (2010).
M. Khanuja, D. Varandani, and B. R. Mehta, Appl. Phys. Lett. 91, 253121 (2007).
H. Firouzabadi, N. Iranpoor, and A. Ghaderi, J. Mol. Catal. A-Chem. 347, 38 (2011).
http://www.sciencelab.com/ Material Safety Data Sheet Palladium chloride MSDS
K. K. R. Datta, M. Eswaramoorthy, and C. N. R. Rao, J. Mater. Chem. 17, 613 (2007).
K. Mallikarjuns, N. J. Sushma, G. Narasimha, K. V. Rao, L. Manoj, and B. D. P. Raju, Proc. Nanoscience, Engineering and Technology (ICONSET), 2011 International Conference, pp. 612–615, IEEE, Tamilnadu, India (2011).
G. Zhang, H. Zhou, J. Hu, M. Liu, and Y. Kuang, Green Chem. 11, 1428 (2009).
http://host.simagis.com
P. K. Khanna and D. Kulkarni, Metal-Organic, and Nano- Metal Chemistry 38, 629 (2008).
N. Basavegowda, K. Mishra, and Y. Rok Lee, New J. Chem. 39, 972 (2014).
A. Jyothi Kora and L. Rastogi, Arabian J. Chem. (In press).
S. Kim, J. Park, Y. Jang, Y. Chung, S. Hwang, and T. Hyeon, Nano Lett. 3, 1289 (2003).
Y. Wang, Y. Zhao, W. He, J. Yin, and Y. Su, Thin Solid Films 544, 88 (2013).
C. C. Wang, D. H. Chen, and T.-C. Huang, Colloid. Surface. A 189, 145 (2001).
P. S. Roy, J. Bagchi, and S. K. Bhattacharya, Transit. Metal Chem. 34, 447 (2009).
H. Savaloni, M. Gholipour-Shahraki, and M. A. Player, J. Phys. D: Appl. Phys. 39, 2231 (2006).
E. Howard, M. Swanson, M. C. Morris, P. R. Stinchfild, and E. H. Evans, Standard X-ray Differction Powder Patterns 1, 22 (1985).
A. L. Paterson, Phy. Rev. 56, 978 (1939).
H. Savaloni and R. Babaei, Appl. Surf. Sci. 280, 439 (2013).
F. A. Lewis, Platin. Met. Rev. 26, 121 (1982).
G. A. Frazier and R. Glosser, J. Less-Common Met. 74, 89 (1980).
S. Kishore, J. A. Nelson, J. H. Adair, and P. C. Eklund, J. Alloy. Compd. 389, 234 (2005).
E. H. Nicollian and J. R. Brews, MOS Physics and Technology, Wiley, New York, USA (1982).
H. Bentarzi, Transport in Metal-Oxide-Semiconductor structure; Mobile Ions Effects on the Oxide Properties, pp.1–28, Springer, New York, USA (2011).
W. S. Ruska, Microelectronic Processing, McGraw-Hill, New York, USA (1987).
S. M. Sze, Physics of Semiconductor Devices, Willey, New York, USA (1987).
B. Deal, J. Electrochem. Soc.: Reviews and News 121, 198 (1974).
B. Deal, IEEE Transactions on Electron Devices 27, 606 (1980).
S. Wolf and R. Tauber, Silicon Processing, Vol. 1, Lattice press, Sunset Beach, USA (1986).
A. Tataroglu, S. Altindaland, and M. M. Bulbul, Microelectron. Eng. 81, 140 (2005).
P. Pandey, J. Srivastava, V. Mishra, and R. Dwivedi, Solid State Sci. 11, 1370 (2009).
CRC Handbook of Chemistry and Physics Version, pp. 12- 114, CRC Press, Florida (2008).
J. L. Autran, D. Munteanu, R. Dinescu, and M. Houssa, J. Non-Cryst. Solids 322, 219 (2003).
M. C. Steele, J. W. Hile, and B. A. MacIver, J. Appl. Phys. 47, 2537 (1976).
J. Fogelberg, M. Eriksson, H. M. Dannetun, and L. G. Petersson, J. Appl. Phys. 78, 988 (1995).
M. Eriksson and L. G. Ekedahl, Sensor. Actuat. B-Chem. 42, 217 (1997).
I. Lundstrom and T. Distefano, Surf. Sci. 59, 23 (1976).
C. Lu, Z. Chen, and K. Saito, Sensor. Actuat. B-Chem. 122, 556 (2007).
D. Dwivedi, R. Dwivedi, and S. K. Srivastava, Sensor. Actuat. B-Chem. 71, 161 (2000).
G. Jordan, IEEE Trans. Electron. Dev. 32, 1158 (1985).
B. Xie, S. Zhang, F. Liu, X. Peng, F. Song, G. Wang, and M. Han, Sensor. Actuat. A-Phys. 181, 20 (2012).
J. S. Seybold, Introduction to RF Propagation, p. 22, John Wiley & Sons, New Jersey, USA (2005).
K. J. Rakesh, S. Krishnan, M. Yoshimura, and A. Kumar, Nanoscale Res. Lett. 4, 1191 (2009).
A. Sieverts, Zeitschrift für Metallkunde 21, 37 (1929).
C. K. Gupta, Chemical Metallurgy: Principles and Practice, p. 273, Wiley-VCH, Weinhiem, Germany (2003).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Aval, L.F., Elahi, S.M. Hydrogen gas detection using MOS capacitor sensor based on palladium nanoparticles-gate. Electron. Mater. Lett. 13, 77–85 (2017). https://doi.org/10.1007/s13391-017-6147-0
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s13391-017-6147-0