Abstract
ZnO is a typical direct wide-bandgap semiconductor material, which has various morphologies and unique physical and chemical properties, and is widely used in the fields of energy, information technology, biomedicine, and others. The precise design and controllable fabrication of nanostructures have gradually become important avenues to further enhancing the performance of ZnO-based functional nanodevices. This paper introduces the continuous development of patterning technologies, provides a comprehensive review of the optical lithography and laser interference lithography techniques for the controllable fabrication of ZnO nanostructures, and elaborates on the potential applications of such patterned ZnO nanostructures in solar energy, water splitting, light emission devices, and nanogenerators. Patterned ZnO nanostructures with highly controllable morphology and structure possess discrete three-dimensional space structure, enlarged surface area, and improved light capture ability, which realize the efficient carrier regulation, achieve highly efficient energy conversion, and meet the diverse requirements of functional nanodevices. The patterning techniques proposed for the precise design of ZnO nanostructures not only have important guiding significance for the controllable fabrication of complex nanostructures of other materials, but also open up a new route for the further development of functional nanostructures.
摘要
ZnO作为典型的直接带隙宽禁带半导体材料具有丰富的形貌结构和独特的物理、 化学性能, 被广泛应用于能源、 信息技术、 生物医学等领域. 目前纳米结构的精确设计与可控制备已成为改善ZnO基功能型纳器件性能的重要手段. 本论文介绍了利用图案化技术对ZnO纳米结构进行限域生长的技术手段, 重点综述了光刻技术和激光干涉模板法在精细ZnO纳米结构制备方面的研究进展, 及其在光伏电池、 光电化学电池、 发光器件和纳米发电机四种能量转换器件中的应用. 形貌结构可调的ZnO纳米结构具有分立的高精度空间纳米结构、 增大的比表面积、 提升的光子捕获能力, 在与其他材料复合时利于实现高效的载流子行为调控, 获得了高效的能量转换, 满足了不同 功能型纳器件对材料结构的需求. 针对ZnO纳米结构精确设计所发展的一系列图案化技术对其他材料的复杂纳米结构可控制备具有重要的指导意义, 亦为功能型纳器件的进一步发展开辟了一个全新的途径.
Article PDF
Similar content being viewed by others
References
Tisdale WA, Williams KJ, Timp BA, et al. Hot-electron transfer from semiconductor nanocrystals. Science, 2010, 328: 1543–1547
del Alamo JA. Nanometre-scale electronics with III–V compound semiconductors. Nature, 2011, 479: 317–323
Zhang Y, Yang Y, Gu Y, et al. Performance and service behavior in 1-D nanostructured energy conversion devices. Nano Energ, 2015, 14: 30–48
Fortunato E, Barquinha P, Martins R. Oxide semiconductor thinfilm transistors: a review of recent advances. Adv Mater, 2012, 24: 2945–2986
Banan Sadeghian R, Islam MS, Saif Islam M. Ultralow-voltage field-ionization discharge on whiskered silicon nanowires for gassensing applications. Nat Mater, 2011, 10: 135–140
Battaglia C, Cuevas A, De Wolf S. High-efficiency crystalline silicon solar cells: status and perspectives. Energ Environ Sci, 2016, 9: 1552–1576
Nagarajan L, De Souza RA, Samuelis D, et al. A chemically driven insulator–metal transition in non-stoichiometric and amorphous gallium oxide. Nat Mater, 2008, 7: 391–398
Yamaguchi S. Main group oxides: making the transition. Nat Mater, 2008, 7: 353–354
Kuykendall TR, Schwartzberg AM, Aloni S. Gallium nitride nanowires and heterostructures: toward color-tunable and whitelight sources. Adv Mater, 2015, 27: 5805–5812
Li A, Zou J, Han X. Growth of III-V semiconductor nanowires and their heterostructures. Sci China Mater, 2016, 59: 51–91
Wang ZL. Piezopotential gated nanowire devices: piezotronics and piezo-phototronics. Nano Today, 2010, 5: 540–552
Li H, Huang Y, Sun G, et al. Directed growth and microwave absorption property of crossed ZnO netlike micro-/nanostructures. J Phys Chem C, 2010, 114: 10088–10091
Yang Y, Guo W, Wang X, et al. Size dependence of dielectric constant in a single pencil-like ZnO nanowire. Nano Lett, 2012, 12: 1919–1922
Zhang Y, Yan X, Yang Y, et al. Scanning probe study on the piezotronic effect in ZnO nanomaterials and nanodevices. Adv Mater, 2012, 24: 4647–4655
Xu S, Qin Y, Xu C, et al. Self-powered nanowire devices. Nat Nanotech, 2010, 5: 366–373
Qin Y, Wang X, Wang ZL. Microfibre–nanowire hybrid structure for energy scavenging. Nature, 2008, 451: 809–813
Sun X, Gu Y, Wang X, et al. Defects energetics and electronic properties of Li doped ZnO: a hybrid hartree-fock and density functional study. Chin J Chem Phys, 2012, 25: 261–268
Qi J, Zhang Y, Huang Y, et al. Doping and defects in the formation of single-crystal ZnO nanodisks. Appl Phys Lett, 2006, 89: 252115
Ma S, Zhang X, Liao Q, et al. Enzymatic lactic acid sensing by Indoped ZnO nanowires functionalized AlGaAs/GaAs high electron mobility transistor. Sensors Actuators B-Chem, 2015, 212: 41–46
Liu J, Zhang Y, Qi J, et al. In-doped zinc oxide dodecagonal nanometer thick disks. Mater Lett, 2006, 60: 2623–2626
Qi J, Zhang H, Lu S, et al. High performance indium-doped ZnO gas sensor. J Nanomater, 2015, 2015: 1–6
Zhao J, Wang L, Yan X, et al. Structure and photocatalytic activity of Ni-doped ZnO nanorods. Mater Res Bull, 2011, 46: 1207–1210
Gu Y, Zhang X, Wang X, et al. A quantum explanation of the abnormal magnetic behaviour in Mn-doped ZnO nanowires. J Phys-Condens Matter, 2007, 19: 236223
Zhang X, Zhang Y, Wang ZL, et al. Synthesis and characterization of Zn1−xMnxO nanowires. Appl Phys Lett, 2008, 92: 162102
Chen H, Qi J, Huang Y, et al. Synthesis, structure and properties of Sn-doped ZnO nanobelts. Acta Physico-Chim Sin, 2007, 23: 55–58
Tang LD, Zhang Y, Yan XQ, et al. Preparation and characteristics of transparent p-type ZnO film by Al and N co-doping method. Appl Surf Sci, 2008, 254: 4508–4511
Shen Y, Yan X, Si H, et al. Improved photoresponse performance of self-powered ZnO/spiro-MeOTAD heterojunction ultraviolet photodetector by piezo-phototronic effect. ACS Appl Mater Interfaces, 2016, 8: 6137–6143
Dai Y, Zhang Y, Li QK, et al. Synthesis and optical properties of tetrapod-like zinc oxide nanorods. Chem Phys Lett, 2002, 358: 83–86
Leschkies KS, Divakar R, Basu J, et al. Photosensitization of ZnO nanowires with CdSe quantum dots for photovoltaic devices. Nano Lett, 2007, 7: 1793–1798
Dai Y, Zhang Y, Wang ZL. The octa-twin tetraleg ZnO nanostructures. Solid State Commun, 2003, 126: 629–633
Zhang L, Bai S, Su C, et al. A high-reliability kevlar fiber-ZnO nanowires hybrid nanogenerator and its application on selfpowered UV detection. Adv Funct Mater, 2015, 25: 5794–5798
Liao Q, Zhang Z, Zhang X, et al. Flexible piezoelectric nanogenerators based on a fiber/ZnO nanowires/paper hybrid structure for energy harvesting. Nano Res, 2014, 7: 917–928
Kumar B, Kim SW. Energy harvesting based on semiconducting piezoelectric ZnO nanostructures. Nano Energ, 2012, 1: 342–355
Kim D, Lee KY, Gupta MK, et al. Self-compensated insulating ZnO-based piezoelectric nanogenerators. Adv Funct Mater, 2014, 24: 6949–6955
Liao X, Yan X, Lin P, et al. Enhanced performance of ZnO piezotronic pressure sensor through electron-tunneling modulation of MgO nanolayer. ACS Appl Mater Interfaces, 2015, 7: 1602–1607
Lin P, Yan X, Zhang Z, et al. Self-powered UV photosensor based on PEDOT:PSS/ZnO micro/nanowire with strain-modulated photoresponse. ACS Appl Mater Interfaces, 2013, 5: 3671–3676
Wang Z, Qi J, Yan XQ, et al. A self-powered strain senor based on a ZnO/PEDOT:PSS hybrid structure. RSC Adv, 2013, 3: 17011–17015
Chen S, Lou Z, Chen D, et al. Highly flexible strain sensor based on ZnO nanowires and P(VDF-TrFE) fibers for wearable electronic device. Sci China Mater, 2016, 59: 173–181
Willander M, Nur O, Zhao QX, et al. Zinc oxide nanorod based photonic devices: recent progress in growth, light emitting diodes and lasers. Nanotechnology, 2009, 20: 332001
Zhang XM, Lu MY, Zhang Y, et al. Fabrication of a highbrightness blue-light-emitting diode using a ZnO-nanowire array grown on p-GaN thin film. Adv Mater, 2009, 21: 2767–2770
Liao Q, Liang M, Zhang Z, et al. Strain-modulation and service behavior of Au–MgO–ZnO ultraviolet photodetector by piezophototronic effect. Nano Res, 2015, 8: 3772–3779
Soci C, Zhang A, Xiang B, et al. ZnO nanowire UV photodetectors with high internal gain. Nano Lett, 2007, 7: 1003–1009
Liao X, Liao Q, Zhang Z, et al. A highly stretchable ZnO@fiberbased multifunctional nanosensor for strain/temperature/UV detection. Adv Funct Mater, 2016, 26: 3074–3081
Bai S, Wu W, Qin Y, et al. High-performance integrated ZnO nanowire UV sensors on rigid and flexible substrates. Adv Funct Mater, 2011, 21: 4464–4469
Xue M, Zhou H, Xu Y, et al. High-performance ultraviolet-visible tunable perovskite photodetector based on solar cell structure. Sci China Mater, 2017, 60: 407–414
Zhang G, Liao Q, Qin Z, et al. Fast sensitization process of ZnOnanorod- array electrodes by electrophoresis for dye-sensitized solar cells. RSC Adv, 2014, 4: 39332–39336
Law M, Greene LE, Johnson JC, et al. Nanowire dye-sensitized solar cells. Nat Mater, 2005, 4: 455–459
Mahmood K, Swain BS, Amassian A. 16.1% Efficient hysteresisfree mesostructured perovskite solar cells based on synergistically improved ZnO nanorod arrays. Adv Energ Mater, 2015, 5: 1500568
Zhao H, Wu Q, Hou J, et al. Enhanced light harvesting and electron collection in quantum dot sensitized solar cells by TiO2 passivation on ZnO nanorod arrays. Sci China Mater, 2017, 60: 239–250
Young SJ, Liu YH. Field emission properties of Al-doped ZnO nanosheet based on field emitter device with UV exposure. RSC Adv, 2017, 7: 14219–14223
Sankaran KJ, Afsal M, Lou SC, et al. Electron field emission enhancement of vertically aligned ultrananocrystalline diamondcoated ZnO core-shell heterostructured nanorods. Small, 2014, 10: 179–185
Kang Z, Yan X, Wang Y, et al. Self-powered photoelectrochemical biosensing platform based on Au NPs@ZnO nanorods array. Nano Res, 2016, 9: 344–352
Zhang Y, Kang Z, Yan X, et al. ZnO nanostructures in enzyme biosensors. Sci China Mater, 2015, 58: 60–76
Kang Z, Gu Y, Yan X, et al. Enhanced photoelectrochemical property of ZnO nanorods array synthesized on reduced graphene oxide for self-powered biosensing application. Biosens Bioelectron, 2015, 64: 499–504
Kang Z, Yan X, Wang Y, et al. Electronic structure engineering of Cu2O film/ZnO nanorods array all-oxide p-n heterostructure for enhanced photoelectrochemical property and self-powered biosensing application. Sci Rep, 2015, 5: 7882
He J, Huang Y, Zhang Y, et al. Large-scale synthesis, microstructure and growth mechanism of self-assembled core–shell ZnO/SiOx nanowires. Mater Lett, 2006, 60: 150–153
Yin X, Wang X. Kinetics-driven crystal facets evolution at the tip of nanowires: a new implementation of the Ostwald-Lussac law. Nano Lett, 2016, 16: 7078–7084
Li L, Zhai T, Bando Y, et al. Recent progress of one-dimensional ZnO nanostructured solar cells. Nano Energ, 2012, 1: 91–106
Wu Y, Wang D, Li Y. Understanding of the major reactions in solution synthesis of functional nanomaterials. Sci China Mater, 2016, 59: 938–996
Zhang Z, Han X, Zou J. Direct realizing the growth direction of epitaxial nanowires by electron microscopy. Sci China Mater, 2015, 58: 433–440
Sun Z, Liao T, Kou L. Strategies for designing metal oxide nanostructures. Sci China Mater, 2017, 60: 1–24
Nai J, Kang J, Guo L. Tailoring the shape of amorphous nanomaterials: recent developments and applications. Sci China Mater, 2015, 58: 44–59
Wang X, Summers CJ, Wang ZL. Large-scale hexagonal-patterned growth of aligned ZnO nanorods for nano-optoelectronics and nanosensor arrays. Nano Lett, 2004, 4: 423–426
Li C, Hong G, Wang P, et al. Wet chemical approaches to patterned arrays of well-aligned ZnO nanopillars assisted by monolayer colloidal crystals. Chem Mater, 2009, 21: 891–897
Ye X, Cai A, Shao J, et al. Large area assembly of patterned nanoparticles by a polydimethylsiloxane template. Sci China Mater, 2015, 58: 884–892
Seo YH, Kim LH, Kim YB, et al. Nanoprobe arrays for multiple single cell insertion using heterogeneous nanosphere lithography (HNSL). Nanoscale, 2013, 5: 7809–7813
Zeng H, Xu X, Bando Y, et al. Template deformation-tailored ZnO nanorod/nanowire arrays: full growth control and optimization of field-emission. Adv Funct Mater, 2009, 19: 3165–3172
Kim SB, Lee WW, Yi J, et al. Simple, large-scale patterning of hydrophobic ZnO nanorod arrays. ACS Appl Mater Interfaces, 2012, 4: 3910–3915
Lee WW, Kim SB, Yi J, et al. Surface polarity-dependent cathodoluminescence in hydrothermally grown ZnO hexagonal rods. J Phys Chem C, 2012, 116: 456–460
Zhang D, Wang S, Cheng K, et al. Controllable fabrication of patterned ZnO nanorod arrays: investigations into the impacts on their morphology. ACS Appl Mater Interfaces, 2012, 4: 2969–2977
Xu S, Wei Y, Kirkham M, et al. Patterned growth of vertically aligned ZnO nanowire arrays on inorganic substrates at low temperature without catalyst. J Am Chem Soc, 2008, 130: 14958–14959
Kim YJ, Yoo H, Lee CH, et al. Position- and morphology-controlled ZnO nanostructures grown on graphene layers. Adv Mater, 2012, 24: 5565–5569
Cheng C, Lei M, Feng L, et al. High-quality ZnO nanowire arrays directly fabricated from photoresists. ACS Nano, 2009, 3: 53–58
Tian Y, Chen H, Zhu X, et al. Selective growth and characterization of ZnO nanorods assembled a hexagonal pattern on H2- decomposed GaN epilayer. Front Optoelectron, 2013, 6: 440–447
Lee SH, Parish CM, Xu J. Anisotropic epitaxial ZnO/CdO core/ shell heterostructure nanorods. Nanoscale Res Lett, 2012, 7: 626
Lin MS, Chen CC, Wang WC, et al. Fabrication of the selectivegrowth ZnO nanorods with a hole-array pattern on a p-type GaN: Mg layer through a chemical bath deposition process. Thin Solid Films, 2010, 518: 7398–7402
Kim KS, Jeong H, Jeong MS, et al. Polymer-templated hydrothermal growth of vertically aligned single-crystal ZnO nanorods and morphological transformations using structural polarity. Adv Funct Mater, 2010, 20: 3055–3063
Miyake M, Chen YC, Braun PV, et al. Fabrication of three-dimensional photonic crystals using multibeam interference lithography and electrodeposition. Adv Mater, 2009, 21: 3012–3015
Wei Y, Wu W, Guo R, et al. Wafer-scale high-throughput ordered growth of vertically aligned ZnO nanowire arrays. Nano Lett, 2010, 10: 3414–3419
Yuan D, Guo R, Wei Y, et al. Heteroepitaxial patterned growth of vertically aligned and periodically distributed ZnO nanowires on GaN using laser interference ablation. Adv Funct Mater, 2010, 20: 3484–3489
Masuda Y, Kinoshita N, Sato F, et al. Site-selective deposition and morphology control of UV- and visible-light-emitting ZnO crystals. Cryst Growth Des, 2006, 6: 75–78
McCarley RL, Vaidya B, Wei S, et al. Resist-free patterning of surface architectures in polymer-based microanalytical devices. J Am Chem Soc, 2005, 127: 842–843
Yang P, Zou S, Yang W. Positive and negative ZnO micropatterning on functionalized polymer surfaces. Small, 2008, 4: 1527–1536
Morales AM, Lieber CM. A laser ablation method for the synthesis of crystalline semiconductor nanowires. Science, 1998, 279: 208–211
Chen X, Yan X, Bai Z, et al. Facile fabrication of large-scale patterned ZnO nanorod arrays with tunable arrangement, period and morphology. CrystEngComm, 2013, 15: 8022–8028
Morin SA, Amos FF, Jin S. Biomimetic assembly of zinc oxide nanorods onto flexible polymers. J Am Chem Soc, 2007, 129: 13776–13777
Chen X, Yan X, Bai Z, et al. High-throughput fabrication of largescale highly ordered ZnO nanorod arrays via three-beam interference lithography. CrystEngComm, 2013, 15: 8416–8421
Cao F, Tian W, Gu B, et al. High-performance UV–vis photodetectors based on electrospun ZnO nanofiber-solution processed perovskite hybrid structures. Nano Res, 2017, 10: 2244–2256
Chen X, Lin P, Yan X, et al. Three-dimensional ordered ZnO/ Cu2O nanoheterojunctions for efficient metal–oxide solar cells. ACS Appl Mater Interfaces, 2015, 7: 3216–3223
Liyanage WPR, Wilson JS, Kinzel EC, et al. Fabrication of CdTe nanorod arrays over large area through patterned electrodeposition for efficient solar energy conversion. Sol Energ Mater Sol Cells, 2015, 133: 260–267
Li Y, Yan X, Zheng X, et al. Fiber-shaped asymmetric supercapacitors with ultrahigh energy density for flexible/wearable energy storage. J Mater Chem A, 2016, 4: 17704–17710
Liu S, Liao Q, Lu S, et al. Strain modulation in graphene/ZnO nanorod film schottky junction for enhanced photosensing performance. Adv Funct Mater, 2016, 26: 1347–1353
Tian W, Zhang C, Zhai T, et al. Flexible ultraviolet photodetectors with broad photoresponse based on branched ZnS-ZnO heterostructure nanofilms. Adv Mater, 2014, 26: 3088–3093
Sun Y, Yan X, Zheng X, et al. Influence of carrier concentration on the resistive switching characteristics of a ZnO-based memristor. Nano Res, 2016, 9: 1116–1124
Tian W, Zhai T, Zhang C, et al. Low-cost fully transparent ultraviolet photodetectors based on electrospun ZnO-SnO2 heterojunction nanofibers. Adv Mater, 2013, 25: 4625–4630
Sun Y, Yan X, Zheng X, et al. High on–off ratio improvement of ZnO-based forming-free memristor by surface hydrogen annealing. ACS Appl Mater Interfaces, 2015, 7: 7382–7388
Liu S, Wang L, Feng X, et al. Ultrasensitive 2D ZnO piezotronic transistor array for high resolution tactile imaging. Adv Mater, 2017, 29: 1606346
Si H, Liao Q, Zhang Z, et al. An innovative design of perovskite solar cells with Al2O3 inserting at ZnO/perovskite interface for improving the performance and stability. Nano Energ, 2016, 22: 223–231
Lewis NS. Research opportunities to advance solar energy utilization. Science, 2016, 351: aad1920–aad1920
Si H, Liao Q, Kang Z, et al. Deciphering the NH4PbI3 intermediate phase for simultaneous improvement on nucleation and crystal growth of perovskite. Adv Funct Mater, 2017, 499: 1701804
Polman A, Knight M, Garnett EC, et al. Photovoltaic materials: Present efficiencies and future challenges. Science, 2016, 352: aad4424–aad4424
Grätzel M. Dye-sensitized solar cells. J Photochem Photobiol CPhotochem Rev, 2003, 4: 145–153
Thavasi V, Renugopalakrishnan V, Jose R, et al. Controlled electron injection and transport at materials interfaces in dye sensitized solar cells. Mater Sci Eng-R-Rep, 2009, 63: 81–99
Bouclé J, Ackermann J. Solid-state dye-sensitized and bulk heterojunction solar cells using TiO2 and ZnO nanostructures: recent progress and new concepts at the borderline. Polym Int, 2012, 61: 355–373
Li LB, Wu WQ, Rao HS, et al. Hierarchical ZnO nanorod-onnanosheet arrays electrodes for efficient CdSe quantum dot-sensitized solar cells. Sci China Mater, 2016, 59: 807–816
Yu M, Long YZ, Sun B, et al. Recent advances in solar cells based on one-dimensional nanostructure arrays. Nanoscale, 2012, 4: 2783–2796
Chen T, Hu W, Song J, et al. Interface functionalization of photoelectrodes with graphene for high performance dye-sensitized solar cells. Adv Funct Mater, 2012, 22: 5245–5250
Kim J, Koh JK, Kim B, et al. Nanopatterning of mesoporous inorganic oxide films for efficient light harvesting of dye-sensitized solar cells. Angew Chem Int Ed, 2012, 51: 6864–6869
Chen X, Bai Z, Yan X, et al. Design of efficient dye-sensitized solar cells with patterned ZnO–ZnS core–shell nanowire array photoanodes. Nanoscale, 2014, 6: 4691–4697
Zoolfakar AS, Rani RA, Morfa AJ, et al. Enhancing the current density of electrodeposited ZnO–Cu2O solar cells by engineering their heterointerfaces. J Mater Chem, 2012, 22: 21767–21775
Marin AT, Muñoz-Rojas D, Iza DC, et al. Novel atmospheric growth technique to improve both light absorption and charge collection in ZnO/Cu2O thin film solar cells. Adv Funct Mater, 2013, 23: 3413–3419
Lee YS, Heo J, Siah SC, et al. Ultrathin amorphous zinc-tin-oxide buffer layer for enhancing heterojunction interface quality in metal-oxide solar cells. Energ Environ Sci, 2013, 6: 2112–2118
Cui J, Gibson UJ. A simple two-step electrodeposition of Cu2O/ZnO nanopillar solar cells. J Phys Chem C, 2010, 114: 6408–6412
Liu J, Liu Y, Liu N, et al. Metal-free efficient photocatalyst for stable visible water splitting via a two-electron pathway. Science, 2015, 347: 970–974
Liu Y, Gu Y, Yan X, et al. Design of sandwich-structured ZnO/ZnS/Au photoanode for enhanced efficiency of photoelectrochemical water splitting. Nano Res, 2015, 8: 2891–2900
Wang W, Tadé MO, Shao Z. Research progress of perovskite materials in photocatalysis- and photovoltaics-related energy conversion and environmental treatment. Chem Soc Rev, 2015, 44: 5371–5408
Liu Y, Kang Z, Si H, et al. Cactus-like hierarchical nanorodnanosheet mixed dimensional photoanode for efficient and stable water splitting. Nano Energ, 2017, 35: 189–198
Marschall R. Semiconductor composites: strategies for enhancing charge carrier separation to improve photocatalytic activity. Adv Funct Mater, 2014, 24: 2421–2440
Wu F, Cao F, Liu Q, et al. Enhancing photoelectrochemical activity with three-dimensional p-CuO/n-ZnO junction photocathodes. Sci China Mater, 2016, 59: 825–832
Cao S, Yan X, Kang Z, et al. Band alignment engineering for improved performance and stability of ZnFe2O4 modified CdS/ZnO nanostructured photoanode for PEC water splitting. Nano Energ, 2016, 24: 25–31
Yu Y, Zhang Z, Yin X, et al. Enhanced photoelectrochemical efficiency and stability using a conformal TiO2 film on a black silicon photoanode. Nat Energ, 2017, 2: 17045
Bai Z, Zhang Y. CdS nanoparticles sensitized large-scale patterned ZnO nanowire arrays for enhanced solar water splitting. J Solid State Electrochem, 2016, 20: 3499–3505
Liu Y, Yan X, Kang Z, et al. Synergistic effect of surface plasmonic particles and surface passivation layer on ZnO nanorods array for improved photoelectrochemical water splitting. Sci Rep, 2016, 6: 29907
Zhao K, Yan X, Gu Y, et al. Self-powered photoelectrochemical biosensor based on CdS/RGO/ZnO nanowire array heterostructure. Small, 2016, 12: 245–251
Hu Y, Yan X, Gu Y, et al. Large-scale patterned ZnO nanorod arrays for efficient photoelectrochemical water splitting. Appl Surf Sci, 2015, 339: 122–127
Kargar A, Sun K, Jing Y, et al. Tailoring n-ZnO/p-Si branched nanowire heterostructures for selective photoelectrochemical water oxidation or reduction. Nano Lett, 2013, 13: 3017–3022
Qiu Y, Yan K, Deng H, et al. Secondary branching and nitrogen doping of ZnO nanotetrapods: building a highly active network for photoelectrochemical water splitting. Nano Lett, 2012, 12: 407–413
Zhang X, Liu Y, Kang Z. 3D branched ZnO nanowire arrays decorated with plasmonic Au nanoparticles for high-performance photoelectrochemical water splitting. ACS Appl Mater Interfaces, 2014, 6: 4480–4489
Yang JS, Wu JJ. Low-potential driven fully-depleted BiVO4/ZnO heterojunction nanodendrite array photoanodes for photoelectrochemical water splitting. Nano Energ, 2017, 32: 232–240
Bai Z, Yan X, Li Y, et al. 3D-branched ZnO/CdS nanowire arrays for solar water splitting and the service safety research. Adv Energ Mater, 2016, 6: 1501459
Chen W, Qiu Y, Yang S. Branched ZnO nanostructures as building blocks of photoelectrodes for efficient solar energy conversion. Phys Chem Chem Phys, 2012, 14: 10872–10881
Sun K, Jing Y, Li C, et al. 3D branched nanowire heterojunction photoelectrodes for high-efficiency solar water splitting and H2 generation. Nanoscale, 2012, 4: 1515–1521
Wierer JJ, David A, Megens MM. III-nitride photonic-crystal light-emitting diodes with high extraction efficiency. Nat Photon, 2009, 3: 163–169
Nadarajah A, Word RC, Meiss J, et al. Flexible inorganic nanowire light-emitting diode. Nano Lett, 2008, 8: 534–537
Bao R, Wang C, Peng Z, et al. Light-emission enhancement in a flexible and size-controllable ZnO nanowire/organic light-emitting diode array by the piezotronic effect. ACS Photonics, 2017, 4: 1344–1349
Li X, Liang R, Tao J, et al. Flexible light emission diode arrays made of transferred Si microwires-ZnO nanofilm with piezophototronic effect enhanced lighting. ACS Nano, 2017, 11: 3883–3889
Shi ZF, Sun XG, Wu D, et al. High-performance planar green light-emitting diodes based on a PEDOT:PSS/CH3NH3PbBr3/ZnO sandwich structure. Nanoscale, 2016, 8: 10035–10042
Li X, Qi J, Zhang Q, et al. Saturated blue-violet electroluminescence from single ZnO micro/nanowire and p-GaN film hybrid light-emitting diodes. Appl Phys Lett, 2013, 102: 221103
Yang Q, Liu Y, Pan C, et al. Largely enhanced efficiency in ZnO nanowire/p-polymer hybridized inorganic/organic ultraviolet light-emitting diode by piezo-phototronic effect. Nano Lett, 2013, 13: 607–613
Shen Y, Chen X, Yan X, et al. Low-voltage blue light emission from n-ZnO/p-GaN heterojunction formed by RF magnetron sputtering method. Curr Appl Phys, 2014, 14: 345–348
Kee CS, Ko DK, Lee J. Photonic band gaps of two-dimensional ZnO nanorod photonic crystals. J Phys D-Appl Phys, 2005, 38: 3850–3853
Lee R, Jeong H, Pak Y, et al. Fabrication of zinc oxide hemispheres array and its application into solid state LEDs. Sci Adv Mater, 2014, 6: 2465–2469
Bao R, Wang C, Dong L, et al. Flexible and controllable piezophototronic pressure mapping sensor matrix by ZnO NW/ppolymer LED array. Adv Funct Mater, 2015, 25: 2884–2891
Gu W, Song P, Yin L, et al. Improved light extraction of Ga Nbased LED with patterned Ga-doped ZnO transparent conducting layer. Mol Crysts Liquid Crysts, 2016, 626: 231–237
Li W, Torres D, Díaz R, et al. Nanogenerator-based dual-functional and self-powered thin patch loudspeaker or microphone for flexible electronics. Nat Commun, 2017, 8: 15310
Peng W, Wang X, Yu R, et al. Enhanced performance of a selfpowered organic/inorganic photodetector by pyro-phototronic and piezo-phototronic effects. Adv Mater, 2017, 29: 1606698
Yang Y, Pradel KC, Jing Q, et al. Thermoelectric nanogenerators based on single Sb-doped ZnO micro/nanobelts. ACS Nano, 2012, 6: 6984–6989
Wang X, Song J, Liu J, et al. Direct-current nanogenerator driven by ultrasonic waves. Science, 2007, 316: 102–105
Zhou J, Fei P, Gu Y, et al. Piezoelectric-potential-controlled polarity-reversible Schottky diodes and switches of ZnO wires. Nano Lett, 2008, 8: 3973–3977
Wang ZL, Song J. Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science, 2006, 312: 242–246
Wu W, Wang ZL. Piezotronic nanowire-based resistive switches as programmable electromechanical memories. Nano Lett, 2011, 11: 2779–2785
Lee KY, Bae J, Kim SM, et al. Depletion width engineering via surface modification for high performance semiconducting piezoelectric nanogenerators. Nano Energ, 2014, 8: 165–173
Liu J, Fei P, Song J, et al. Carrier density and Schottky barrier on the performance of DC nanogenerator. Nano Lett, 2008, 8: 328–332
Shin DM, Tsege EL, Kang SH, et al. Freestanding ZnO nanorod/ graphene/ZnO nanorod epitaxial double heterostructure for improved piezoelectric nanogenerators. Nano Energ, 2015, 12: 268–277
Sun Y, Yan X, Zheng X, et al. Effect of carrier screening on ZnObased resistive switching memory devices. Nano Res, 2017, 10: 77–86
Pradel KC, Wu W, Ding Y, et al. Solution-derived ZnO homojunction nanowire films on wearable substrates for energy conversion and self-powered gesture recognition. Nano Lett, 2014, 14: 6897–6905
Sohn JI, Cha SN, Song BG, et al. Engineering of efficiency limiting free carriers and an interfacial energy barrier for an enhancing piezoelectric generation. Energ Environ Sci, 2013, 6: 97–104
Yang D, Qiu Y, Jiang Q, et al. Patterned growth of ZnO nanowires on flexible substrates for enhanced performance of flexible piezoelectric nanogenerators. Appl Phys Lett, 2017, 110: 063901
Romano G, Mantini G, Di Carlo A, et al. Piezoelectric potential in vertically aligned nanowires for high output nanogenerators. Nanotechnology, 2011, 22: 465401
Acknowledgements
This work was supported by the National Key Research and Development Program of China (2013CB932602 and 2016YFA0202701), the Program of Introducing Talents of Discipline to Universities (B14003), the National Natural Science Foundation of China (51527802, 51232001, 51372020 and 51602020), Beijing Municipal Science & Technology Commission (Z151100003315021), and China Postdoctoral Science Foundation (2016M600039).
Author information
Authors and Affiliations
Corresponding authors
Additional information
Yue Zhang is a professor of material physics at the University of Science and Technology Beijing, China. His research focuses on functional nano-materials and nano-devices, novel energy harvesting devices and sensing devices, as well as nanoscale failure and service behavior. Prof. Yue Zhang has conducted or participated in more than 50 major research projects from the central and local governments of China, and has been awarded the financial support for Outstanding Young Scientist Foundation of China and selected as the chief scientist of Major National Scientific Research Projects. He has published more than 400 papers in peer reviewed scientific journals with more than 7000 citations. He has also published 8 monographs, and applied for over 70 patents with 37 authorizations.
Rights and permissions
About this article
Cite this article
Si, H., Kang, Z., Liao, Q. et al. Design and tailoring of patterned ZnO nanostructures for energy conversion applications. Sci. China Mater. 60, 793–810 (2017). https://doi.org/10.1007/s40843-017-9105-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40843-017-9105-3