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Analysis on Selection of Beam Material for Novel Step Structured RF-MEMS Switch used for Satellite Communication Applications

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Abstract

This paper mainly reports a proper selection of beam material for the step structured based RF MEMS switch. Generally, the performance of the device purely depends upon beam material used for the RF switch. There is a wide range of materials available for the beam layer which may change the performance of RF switch with their distinct material properties. Though various material selection methods are implemented earlier, among those methodologies Ashby’s material approach requires minimum execution steps for the beam selection based on various geometrical and performance indices. There are mainly three key performance indices like actuation voltage, S-parameters and residual stress by heat, are used to obtain the desired performance. The material selection in this work says that SU-8, PTFE followed by aluminum and gold are the more suitable materials for beam material selection for Step structured RF-MEMS switch. Due to fabrication complexity, SU-8 and PTFE are not considered for the beam layer. After the investigation, the above given two material (i.e.) Gold and Aluminum are preferable for the beam, owing to its high cost gold is not much preferable material for the beam. Therefore, Aluminum is good for the beam layer.

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Acknowledgements

The Authors would like to thank to NMDC supported by NPMASS, National Institute of Technology, Silchar for providing the necessary computational tools.

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Authors and Affiliations

  1. National MEMS Design Center, Department of Electronics and Communication Engineering, National Institute of Technology (NIT), Silchar-788010, Assam, India

    K. Girija Sravani & Koushik Guha

  2. MEMS Research Center, Department of Electronics and Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur, 522502, India

    K. Girija Sravani & K. Srinivasa Rao

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  1. K. Girija Sravani
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  2. Koushik Guha
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  3. K. Srinivasa Rao
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Correspondence to K. Girija Sravani.

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Girija Sravani, K., Guha, K. & Srinivasa Rao, K. Analysis on Selection of Beam Material for Novel Step Structured RF-MEMS Switch used for Satellite Communication Applications. Trans. Electr. Electron. Mater. 19, 467–474 (2018). https://doi.org/10.1007/s42341-018-0068-y

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  • DOI: https://doi.org/10.1007/s42341-018-0068-y

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