Elsevier

Surface Science

Volume 16, August 1969, Pages 14-33
Surface Science

Definitions and conventions in ellipsometry

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Abstract

Many parameters which appear in the theory of ellipsometry crucially depend on the choice of arbitrary conventions and definitions. This dependence is discussed for nine two-fold choices. On the basis of literature usage, preferences are expressed for one of each of the alternatives and for the nomenclature of the variables involved.

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    Work performed under the auspices of the U.S. Atomic Energy Commission.

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