Elsevier

Thin Solid Films

Volume 8, Issue 3, September 1971, Pages R9-R12
Thin Solid Films

Short communication
A very pure thin film tantalum phase

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Reference (6)

  • WestwoodW.D. et al.

    Thin Solid Films

    (1970)
  • ReadM.H. et al.

    Appl. Phys. Letters

    (1965)
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