Elsevier

Thin Solid Films

Volume 46, Issue 1, 3 October 1977, Pages 59-67
Thin Solid Films

Cadmium selenide sputtered films

https://doi.org/10.1016/0040-6090(77)90340-6Get rights and content

Abstract

Cadmium selenide films were d.c. sputtered in a mixture of hydrogen selenide and argon. The photoconductive properties of these films, which do not require heat treatment, compare favourably with the best film properties reported in the literature for CdS and CdSe. The higher dark resistivity of about 109 ω cm measured through the film compared with about 107 ω cm measured in the plane of the film is attributed to the existence of potential barriers due to stacking faults. Illumination from a tungsten light source of approximately 3 mW cm−2 decreased the resistivity to 105−106ω cm both through and in the plane of the film, and chopping of the light revealed response times of less than 1 ms. The effects of substrate temperature (15–250 °C), film thickness (0.4−4 μ) and other preparation conditions were studied. The films exhibited current saturation at high fields through the film which was ascribed to hole depletion in a region near the anode.

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