Elsevier

Thin Solid Films

Volume 226, Issue 2, 30 April 1993, Pages 196-201
Thin Solid Films

Modelling and characterization of columnar growth in evaporated films

https://doi.org/10.1016/0040-6090(93)90378-3Get rights and content

Abstract

The columnar structure found in thin evaporated films deposited at low temperatures has been accurately reproduced using computer simulations of sequentially deposited hard disc with limited surface diffusion. Empirical relationships between column angle and deposition angle have been found; however, no clear analytical description of the process exists. This work provides simple expressions based on geometrical arguments which describe column angle and density as a function of deposition angle for films evaporated under conditions allowing only limited surface diffusion. The expressions agree well with measured results from evaporated films and hard disc simulations.

References (18)

  • N.G. Nakhodkin et al.

    Thin Solid Films

    (1972)
  • I.J. Hodgkinson et al.

    CRC Crit. Rev. Solid State Mater. Sci.

    (1988)
  • H.A. Macleod

    J. Vac. Sci. Technol. A

    (1986)
  • D.K. Pandya et al.

    J. Appl. Phys.

    (1975)
  • A.M. Haghiri-Gosnet et al.

    J. Vac. Sci. Technol. A

    (1989)
  • B.A. Movchan et al.

    Fiz. Met. Metalloved.

    (1969)
  • D. Henderson et al.

    Appl. Phys. Lett.

    (1974)
  • R.B. Sargent
  • M. Sikkens et al.

    Opt. Eng.

    (1986)
There are more references available in the full text version of this article.

Cited by (0)

View full text
Copyright © 1993 Published by Elsevier B.V.