Elsevier

Vacuum

Volume 45, Issues 10–11, October–November 1994, Pages 997-1000
Vacuum

Vapour-phase coating processes for hard coatings

https://doi.org/10.1016/0042-207X(94)90003-5Get rights and content

Abstract

The processes of vapour-phase deposition such as CVD and PVD are of growing importance for the production of high-grade coatings. Plasma- and ion-assisted processes especially have successfully expanded into the field of hard coatings against wear and friction. Various tools with hard coatings are already widely used on the basis of well-developed processes. New single and multilayer coatings with exceptional adhesive; hardness and wear properties, like binary and ternary refractory metal carbides, nitrides, borides and oxides, DLC-coatings, metal-carbon coatings and even pure extremely hard diamond coatings can nowadays be deposited by vapour-phase processes.

References (22)

  • KG Günther et al.

    Ann CIRP

    (1989)
  • Fv Bernus et al.

    Thin Solid Films

    (1978)
  • H Freller et al.

    Mater Sci Engng

    (1991)
  • PK Bachmann et al.

    Diamond & Related Mater

    (1992)
  • B Lux et al.

    Diamond & Related Mater

    (1992)
  • SJ Bull et al.

    Diamond & Related Mater

    (1992)
  • MZ Karim et al.

    Surf Coat Technol

    (1992)
  • O Knotek et al.

    Surface Coat Technol

    (1989)
  • BF Coll et al.

    Mater Sci Engng

    (1991)
  • E Ertürk et al.

    Thin Solid Films

    (1987)
  • E Ertürk et al.

    Surf Coat Technol

    (1989)
  • Cited by (4)

    • A short review on inorganic thin films from device perspective

      2021, Chemical Solution Synthesis for Materials Design and Thin Film Device Applications
    • Functionalized biomaterial surfaces by micro- and nanofabrication

      2002, Doktorsavhandlingar vid Chalmers Tekniska Hogskola
    • Energetic condensation: Processes, properties, and products

      1995, Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    View full text