Elsevier

Sensors and Actuators

Volume 2, 1981–1982, Pages 275-282
Sensors and Actuators

A special silicon diaphragm pressure sensor with high output and high accuracy

https://doi.org/10.1016/0250-6874(81)80047-9Get rights and content

Abstract

A conventional silicon diaphragm sensor cannot be used in a low pressure range that requires high output and high accuracy. This disadvantage arises from a large pressure-induced deflection of the diaphragm, which is known as the balloon effect. In order to solve this problem, a silicon diaphragm with a center boss has been developed. In this sensor, an annular groove is formed in the back surface of the diaphragm and diffused piezoresistive gagues are formed radially adjacent to the outer and inner edges of the groove on the top surface. Experimental results are explained by a two-cantilever model. The accuracy of this sensor (0.17% of full scale) is ten times better than that of a conventional one in the low pressure range (5 to 100 kPa full scale) and is the same under front and back pressures. These characteristics are achieved in a wide temperature range, from −40 to 120 °C.

References (8)

  • M. Nishihara et al.

    Analysis of the non-linear characteristics of a semiconductor pressure sensor

    Trans. SICE (Japan)

    (1981)
  • O.N. Tufte et al.

    Silicon diffused-element piezoresistive diaphragms

    J. Appl. Phys.

    (1962)
  • S.K.D. Wise et al.

    An IC piezoresistive pressur sensor for biomedical instrumentation

    IEEE Trans.

    (1973)
  • S.P. Timoshenko et al.
    (1959)
There are more references available in the full text version of this article.

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    The four membrane edges can be regarded as a rigid body compared with the thin film. When pressure is applied to the membrane, the distributed reactive force can be simplified as a concentrated load P and a bending moment M at the end of the rood beam as shown in Fig. 5(b) [39,40]. Under the action of the bending moment, this segment deforms into a circular segment with ends defined by the cross-sections S’ shown in Fig. 5(c).

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