A special silicon diaphragm pressure sensor with high output and high accuracy
References (8)
- et al.
Analysis of the non-linear characteristics of a semiconductor pressure sensor
Trans. SICE (Japan)
(1981) - et al.
Silicon diffused-element piezoresistive diaphragms
J. Appl. Phys.
(1962) - et al.
An IC piezoresistive pressur sensor for biomedical instrumentation
IEEE Trans.
(1973) - et al.(1959)
Cited by (51)
Conception and realization of a novel design for a capacitive pressure sensor with high sensitivity and linear response
2022, Results in EngineeringCitation Excerpt :Comb electrodes were also used in which the variation of the overlapping areas of the electrodes causes the change in capacitance [7–10]. Structure modification was proposed for other designed capacitive sensors by adding a central boss [11–13] or a ring [6] to the movable diaphragm or using a diaphragm with a corrugated surface or corrugated edges [14,15]. All these solutions aim to enhance the edges' contribution and obtain a constant deflection over the central part of the movable diaphragm.
A novel capacitive pressure sensor based on non-coplanar comb electrodes
2019, Sensors and Actuators, A: PhysicalCitation Excerpt :One method to improve the linearity is to optimize the electrode structures, such as optimized electrode shape [2], two-electrode structures [3] and an additional reference capacitor electrode [4]. Another method to improve the linearity is to stiffen the diaphragm, including a corrugated edged diaphragm [5], a diaphragm with a boss [6–8] and other improved structures [9–13]. However, the above methods only improve the linearity in a small deflection range, and in the case of large deflection, these methods are no longer applicable, which limits the sensitivity and measurement range of the sensor.
Design, fabrication and characterization of an annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure measurements
2018, Sensors and Actuators, A: PhysicalCitation Excerpt :The four membrane edges can be regarded as a rigid body compared with the thin film. When pressure is applied to the membrane, the distributed reactive force can be simplified as a concentrated load P and a bending moment M at the end of the rood beam as shown in Fig. 5(b) [39,40]. Under the action of the bending moment, this segment deforms into a circular segment with ends defined by the cross-sections S’ shown in Fig. 5(c).
Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement
2018, Solid-State ElectronicsCitation Excerpt :Severe pressure nonlinearity (PNL) may cause a high-sensitivity device of little practical value once it is beyond a certain range [9]. To solve this problem, the E-type membrane structure featured a central island mass was introduced, but this structure sacrificed the sensitivity of the sensor because of the stiffening of the membrane [10]. Sensitivity is proportional to the (membrane length)/(membrane thickness) ratio (L/H), so it can be increased by a larger ratio of that quantity.
A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
2016, Sensors and Actuators, A: PhysicalCitation Excerpt :In order to improve the sensitivity of the piezoresistive pressure sensor and alleviate the contradiction between the high sensitivity and low non-linearity, previous researches were mainly focused on the following three aspects. Firstly, the method of partially stiffening the diaphragm is applied to lower the sensor non-linearity [13–15]. For example, M. Shimazoe et al. [14] developed a sensor chip with a center boss on the diaphragm and an annular groove formed on the surface to alleviate the balloon effect and lower the non-linearity.
Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers
2023, Microsystem Technologies