Tin oxide micro gas sensor for detecting CH3SH
References (7)
A substrate for thin-film gas sensors in microelectronic technology
Sensors and Actuators B
(1990)- et al.
A low power integrated catalytic gas sensor
Sensors and Actuators B
(1993) - et al.
An integrated low-power thin-film CO gas sensor on silicon
Sensors and Actuators
(1988)
Cited by (22)
Selective dual detection of hydrogen sulfide and methyl mercaptan using CuO/CuFe<inf>2</inf>O<inf>4</inf> nanopattern chemiresistors
2021, Sensors and Actuators B: ChemicalCitation Excerpt :According to the National Institute for Occupational Safety and Health, the indoor regulation limits of H2S and MM are 10 ppm and 0.5 ppm, respectively, and the LoDH₂S and LoDMM values are sufficient to monitor indoor VSCs [52,53]. The gas responses to H2S and MM are among the highest values reported in the literature (Tables 1 [21–25,29–32,54] and 2 [19,50,55–58]). Notably, the 3Cu4Fe sensor showed much higher responses to both VSCs compared with a nanofiber mat sensor with the same composition (Fig. S4).
Microstructural evolution of oxides and semiconductor thin films
2011, Progress in Materials ScienceCitation Excerpt :Recently, there is an ever increasing range of techniques which are used to deposit SnO2 thin films. Some of the more common techniques include electron beam evaporation [8], dip coating [9], reactive thermal evaporation [10], chemical vapor deposition (CVD) [11], pulsed laser deposition (PLD) [12], sputtering [13,14], spray pyrolysis [15], atomic layer epitaxy [16], sol–gel [17], plasma polymerisation [18], and glow discharge decomposition of tin compounds [19]. Pulsed laser deposition of thin films has been proven to be a useful technique in recent years because of its ability to achieve rapid growth rate and to produce stoichiometric thin films of complicated compounds such as superconductors [20].
Ultrafast laser micromachining of thermal sprayed coatings for microheaters: Design, fabrication and characterization
2004, Sensors and Actuators, A: PhysicalCorrelation between methylmercaptan gas-sensing properties and its surface chemistry of SnO<inf>2</inf>-based sensor materials
2000, Sensors and Actuators, B: Chemical