Waveguide scattering microscopy

doi:10.1016/S0030-4018(96)00535-4

Optics Communications

Volume 134, Issues 1–6, 15 January 1997, Pages 16-20

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Abstract

Scattering optical waveguide microscopy is introduced as a novel imaging technique, that allows for the microscopic characterization of thin film samples by using the evanescent field of a guided optical wave as the illuminating light source. The image contrast is generated by the scattering intensity of the thin film sample within the evanescent field. Excellent lateral resolution (< 1 μm) is demonstrated for a SiO_x grating. The contrast of the image is investigated with respect to mode number and polarization of the illuminating, propagating waveguide mode.

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Waveguide scattering microscopy

Abstract

Acta Metall

Optical Materials

Appl. Phys. Lett.

Nature