International Journal of Machine Tools and Manufacture
Proposal for a guideline to calibrate interference microscopes for use in roughness measurements
Introduction
This proposal for a guideline for the calibration of interference microscopes has the intention of using the same items that are successfully practised in the guidelines for stylus instruments [1], [2]. Many users from this field have also been involved with optical surface measuring techniques, so that they are familiar with the standard specimens and may easily accept the procedures suggested here (Fig. 1).
Section snippets
Purposes
The purposes of this article are:
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Improve the comparison of the surface measurements between different microscopes and between microscopes and the approved contact stylus instruments.
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Perform the traceability to the length unit.
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Set minimum requirements for the calibration.
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Produce a concept derived from the sense of the standardisation set which exists for stylus contact instruments in the GPS Matrix.
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Introduce procedures using standard specimens, which are defined and approved in the GPS standards
Characteristics of instruments under consideration
This guideline applies to the calibration of optical microscopes for the measurement of surface topography. They are characteristic of an imaging system, which magnifies linearly a part of the surface to be measured onto a sensor with a regular array of detector elements (pixels). Optical imaging systems, which scan and evaluate only a profile line behave in a manner closer to stylus instruments, but can also be treated by the this guideline.
Components
The instrument, that is considered by this guideline
Terminology
The definitions and terminology are based on the GPS standards, especially:
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ISO 3274 [8], definitions for contact stylus instruments;
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ISO 5436-1 [3], concerning standard specimens;
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ISO 4287 [4] concerning definition of surface parameters;
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ISO 4288 [5], concerning measurement and evaluation conditions; and
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ISO 11562 [6], concerning filter behaviour.
The procedures described here refer to the guidelines of DKD rsp. EAL for the calibration of the stylus instruments, DKD-R 4-2 rsp. EAL-G20.
The definition
Reference standards
The standards used here are described in ISO 5436-1. Their purpose and use follow the same manner as they are intended for their use with stylus instruments. A short description of the procedures in which they are applied, their aims and results are given in Table 1. A detailed description of the procedures is given in Section 6.
Calibration procedures in detail
In this section the order of descriptions is according to the standard specimens as they are used throughout the calibration procedure. It contains the standard guideline aspects of surrounding conditions, applicability and description of calibration procedures.
The model
The model for the uncertainty calculation for surface parameters with microscopes is structured as in the uncertainty calculation for stylus instruments [12], [13], [14]. According to the chain of functions in the device, in a sequence of successive functions, P{F[G(z)]}, the value K of a parameter P is obtained from the surface topography data z. With respect to the calculation of uncertainty of the measurements, calculation is from the inside to the outside as to how the uncertainty of the
References (14)
- DKD-R-4-2 Blatt 2, Richtlinie zum Kalibrieren von Tastschnittgeräten im Deutschen Kalibrierdienst,...
- EAL G-20, Calibration of stylus instruments for measuring surface...
- ISO 5436-1, Calibration Specimens — Stylus Instruments — Types, Calibration and...
- ISO 4287, Surface–texture–profile Method — Terms, Definitions and Surface Texture...
- ISO 4288, Surface–texture–profile Method — Rules and Procedures for the Assessment of Surface...
- ISO 11562, Surface–texture–profile Method — Metrological Characteristics of Phase Correct...
- K. Stout, BCR-Report, Development of Methods for the Characterisation of Roughness in Three Dimensions, Brussels,...
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