Micromachined Electric Field Mill Employing a Vertical Moving Shutter☆
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open access
Keywords
Electric field measurement
electric fields
micromachining
electric field mill
thermal actuator
MEFM
MEMS
Cited by (0)
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Peer-review under responsibility of the scientific committee of Eurosensors 2014.
Copyright © 2014 Published by Elsevier Ltd.