Elsevier

Thin Solid Films

Volume 616, 1 October 2016, Pages 601-607
Thin Solid Films

Corrosion behaviors of TiN and Ti-Si-N (with 2.9 at.% and 5.0 at.% Si) coatings by electrochemical impedance spectroscopy

https://doi.org/10.1016/j.tsf.2016.08.005Get rights and content

Highlights

  • Ti-Si-N with 5.0 at.% Si exhibited nanocomposite structure.

  • The addition of Si increased corrosion resistance greatly.

  • Nanocomposite structure could effectively retard the electrolyte penetration.

Abstract

TiN and Ti-Si-N (2.9 at.% and 5.0 at.% Si) coatings were fabricated on the surface of polished Si (100) wafers and stainless steel substrates by cathodic arc ion plating. The XRD results showed that the preferred orientation of the TiN crystals changed from TiN (111) to TiN (200) with an increasing silicon content. The TiN coating exhibited a polycrystalline structure with an average grain size of approximately 18 nm, while the Ti-Si-N coatings exhibited a nanocomposite structure of TiN nanocrystals embedded in amorphous Si3N4. In electrochemical impedance spectroscopy (EIS) tests, the amorphous Si3N4 phase distributed on the boundaries of the Ti-Si-N (5.0 at.% Si) coating and acted as an effective barrier layer against the penetration of the corrosion solution, which resulted in better corrosion resistance compared with TiN and the lower-Si-content Ti-Si-N coating (2.9 at.% Si). Immersion tests and surface morphology observations of the samples after corrosion were also carried out to investigate the corrosion mechanism and behaviors of TiN and Ti-Si-N composite coatings.

Introduction

The Ti-Si-N composite coating has been widely explored as a good candidate for increasing the lifetime of cutting tools because of its high hardness, low friction coefficient and excellent oxidation resistance [1], [2], [3], [4]. The silicon content exerts a tremendous influence on the structure and mechanical properties of the Ti-Si-N coatings [5], [6], [7], [8], [9]. According to the thermodynamic phase diagram, Ti-Si-N coatings will form a solid solution structure when the silicon content is lower than 3 at.% and will transform into a nanocomposite structure when the silicon content falls in the range of 3 to 12 at.% [10], [11]. However, attention has mainly been paid to the mechanical performance and microstructure of Ti-Si-N composite coatings, with little research devoted to a quantitative analysis of their corrosion properties and mechanism.

EIS is a perturbative characterization of the dynamics of an electrochemical performance and has been successfully applied in evaluating the corrosion resistance of thin films exposed to a corrosion medium. The modeling results of EIS spectra can provide abundant quantitative information on the corrosion performance of coatings such as the polarization resistance, porosity resistance and capacitance [12]. The corrosion resistances of CrN, TiN and a CrN/TiN multilayer have been evaluated quantitatively utilizing EIS, and it was found that CrN coatings with equiaxed grains exhibit better corrosion performance than columnar TiN coatings [13]. In addition, an upward protective efficiency was observed in a CrN/TiN multilayer with a decreasing CrN inner layer thickness, approaching a maximum of 99.01% at a thickness ratio of 1:9 [14]. With regard to the evaluation of the corrosion behaviors of nanocomposite coatings, C. L. Chang and V. E. Selvi used EIS to compare the performances of Ti-Si-N and TiN coatings and reported that Ti-Si-N exhibited a better corrosion resistance in 3.5 wt.% NaCl solution [15], [16]. Ha Yoo et al. [17] also found a better corrosion resistance of Ti-Al-Si-N nanocomposite coatings using EIS compared to a conventional Ti-Al-N columnar coating, resulting from the refinement of the microstructure with Si incorporation. Nevertheless, few papers have concentrated on the corrosion mechanism and long-term corrosion behaviors of Ti-Si-N nanocomposite coatings with different Si contents.

In this paper, the corrosion resistances of TiN and Ti-Si-N were investigated by utilizing potentiodynamic tests and EIS in 3.5 wt.% NaCl solution. To further explore the corrosion mechanism and behaviors of Ti-Si-N coatings, immersion tests were carried out for different times ranging from 0 to 758 h. Finally, the effects of the silicon content on the corrosion mechanism of Ti-Si-N coatings are examined according to the morphologies and EDS results of the coatings after the immersion tests.

Section snippets

Sample deposition and characterization

TiN and Ti-Si-N coatings were deposited onto Si (100) and polished 304 stainless steel substrates by cathodic arc ion plating. The coatings deposited on silicon substrates were prepared for structural analysis, and those on stainless steel substrates were for the purpose of electrochemical testing. In the deposition equipment, Ti and Ti-Si alloy targets were installed on opposite sides of the chamber wall. Prior to the deposition process, Ti+ ion bombardment was carried out to remove

Microstructure properties

The surface morphologies and cross-sectional images of the as-deposited coatings are shown in Fig. 1, Fig. 2. Obvious macro particle and hole contamination with a diameter of approximately 7 μm were observed on the surfaces of the coatings. The macroparticles were generated from the low melting point Ti-Si alloy target, and the holes were attributed to the exfoliation of the contaminated particles due to the weak adhesive force between the particles and the coatings [18], [19]. The density of

Conclusions

TiN, Ti-Si-N I and Ti-Si-N II coatings were successfully deposited onto stainless steel and Si (100) wafers by cathodic arc ion plating. The Ti-Si-N II coating with 5.0 at.% Si exhibited a denser structure with a smaller grain size. Based on the potentiodynamic polarization curves and Nyquist plots obtained by EIS, the silicon doping greatly increased the corrosion resistance of the TiN coatings. The corrosion current density of the Ti-Si-N II coating decreases from 0.24 down to 0.2 μA/cm2, while

Acknowledgements

This work was supported by the National Natural Science Foundation of China under contract Nos. 11275141 and 11175133, and the International Cooperation Program of the Ministry of Science and Technology of China under contract No. 2011DFR50580.

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