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Device patterning of PZT/Pt/Ti/thin films on SiO2/Si3N4 membrane by a chemical wet etching approach

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore, 639798

    W. Liu, J. Ko & W. Zhu

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  1. W. Liu
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  2. J. Ko
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  3. W. Zhu
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Liu, W., Ko, J. & Zhu, W. Device patterning of PZT/Pt/Ti/thin films on SiO2/Si3N4 membrane by a chemical wet etching approach. Journal of Materials Science Letters 19, 2263–2265 (2000). https://doi.org/10.1023/A:1006745428656

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  • DOI: https://doi.org/10.1023/A:1006745428656

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