Abstract
This paper illustrates a smart sensor system for carbonmonoxide detection. An innovative technological approach hasbeen pursued to fabricate gas sensors on silicon substrate, compatiblewith IC fabrication. A mixed analog-digital electronic interfaceprocesses the outputs of three sensors to compensate relativehumidity and interfering gases. Sigma-delta signal processingand low-frequency noise reduction techniques are used to minimizesilicon area and to meet the required performance in a standardCMOS technology.
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Cardinali, G.C., Dori, L., Fiorini, M. et al. A Smart Sensor System for Carbon Monoxide Detection. Analog Integrated Circuits and Signal Processing 14, 275–296 (1997). https://doi.org/10.1023/A:1008250204824
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DOI: https://doi.org/10.1023/A:1008250204824