Abstract
The lattice Boltzmann model is a simplified kinetic method based on the particle distribution function. We use this method to simulate problems in MEMS, in which the velocity slip near the wall plays an important role. It is demonstrated that the lattice Boltzmann method can capture the fundamental behaviors in micro-channel flow, including velocity slip, nonlinear pressure drop along the channel and mass flow rate variation with Knudsen number. The Knudsen number dependence of the position of the vortex center and the pressure contour in micro-cavity flows is also demonstrated.
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REFERENCES
C. M. Ho and Y. C. Tai, Micro-electro-mechanical-systems (MEMS) and fluid flows, Ann. Rev. Fluid Mech. 30:579 (1998).
E. B. Arkilic, M. A. Schmidt, and K. S. Breuer, Gaseous slip flow in long micro-channels, J. MEMS 6:167 (1997).
S. A. Schaaf and P. L. Chambre, Flow of Rarefied Gases (Princeton University Press, Princeton, New Jersey, 1961).
J. Koplik and J. R. Banavar, Continuum deductions from molecular hydrodynamics, Ann. Rev. Fluid Mech. 27:257 (1995).
A. Beskok, G. E. Karniadakis, and W. Trimmer, Rarefaction and compressibility effects in gas micro-flows, J. of Fluids Engineering 118:448 (1996).
Shiyi Chen and Gary D. Doolen, Lattice Boltzmann method for fluid flows, Ann. Rev. Fluid Mech. 30:329 (1998).
Y. H. Qian, D. d'Humiéres, and P. Lallemand, Lattice BGK models for Navier-Stokes equation, Europhys. Lett. 17:479 (1992).
H. Chen, S. Chen, and W. H. Matthaeus, Recovery of the Navier-Stokes equations using a lattice gas Boltzmann method, Phys. Rev. A45:R5339 (1992).
S. Y. Chen, D. Martinez, and R. W. Mei, On boundary conditions in lattice Boltzmann methods, Phys. Fluids 8(9):2527 (1996).
M. Cieplak, Joe Koplik, and J. R. Banavar, Boundary conditions at fluid-solid interface, Phys. Rev. Lett. 86:803 (2001).
G. K. Karniadakis, S. A. Orszag, E. M. Ronquist, and A. T. Patera, Spectral element and lattice gas methods for incompressible fluid dynamics, in Compressible Computational Fluid Dynamics, M. D. Gunzburger and R. A. Nicolaides, eds. (Cambridge University Press, 1993).
Shuling Hou, Qisu Zou, Shiyi Chen, Gary Doolen, and Allen C. Cogley, Simulation of incompressible Navier-Stokes fluid flows using a lattice Boltzmann method, J. Comput. Phys. 118:329 (1995).
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Nie, X., Doolen, G.D. & Chen, S. Lattice-Boltzmann Simulations of Fluid Flows in MEMS. Journal of Statistical Physics 107, 279–289 (2002). https://doi.org/10.1023/A:1014523007427
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DOI: https://doi.org/10.1023/A:1014523007427