Abstract
This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J.R. Anderson, D.T. Chiu, R.J. Jackman, O. Cherniasvskaya, J.C. McDonald, H. Wu, S.H. Whitesides, and G.M. Whitesides, Anal. Chem. 72, 3158 (2000).
D.T. Chiu, N.L. Jeon, S. Huang, R.S. Kane, C.J. Wargo, I.S. Choi, D.E. Ingber, and G.M. Whitesides, Proc. Natl. Acad. Sci. U.S.A. 97, 2408 (2000).
D.C. Duffy, H.J. Gillis, J. Lin, N.F. Sheppard, and G.J. Kellogg, Anal. Chem. 71, 4669 (1999).
D.C. Duffy, J.C. McDonald, O.J.A. Schueller, and G.M. Whitesides, Anal. Chem. 70, 4974 (1998).
M. Elwenspoek, T.S.J. Lammerink, R. Miyake, and J.H.J. Fluitman, J. Micromech. Microeng. 4, 227 (1994).
V. Gass, B.H. van der Schoot, S. Jeanneret, and N.F. de Rooij, J. Micromech. Microeng. 3, 214 (1993).
P. Gravesen, J. Branebjerg, and O.S. Jensen, J. Micromech. Microeng. 3, 168 (1993).
A.G. Hadd, D.E. Raymond, J.W. Halliwell, S.C. Jacobson, and J.M. Ramsey, Anal. Chem. 69, 3407 (1997).
D.J. Harrison, K. Fluri, K. Seiler, Z. Fan, C.S. Effenhauser, and A. Manz, Science 261, 895 (1993).
S.C. Jacobson, C.T. Culbertson, J.E. Daler, and J.M. Ramsey, Anal. Chem. 70, 3476 (1998).
B.-H. Jo and D.J. Beebe, Proc. SPIE-Int. Soc. Opt. Eng. 3877, 222 (1999).
B.-H. Jo, L.M. VanLerberghe, K.M. Motsegood, and D.J. Beebe, J. Microelectromech. Syst. 9, 76 (2000).
M.U. Kopp, A.J.d. Mello, and A. Manz, Science 280, 1046 (1998).
M.U. Kopp, H.J. Crabtree, A. Manz, Curr. Opin. Chem. Bio. 1, 410 (1997).
G.T.A. Kovacs, Micromachined Transducers Sourcebook (McGraw-Hill, New York, 1998).
A. Manz, N. Graber, and H.M. Widmer, Sens. Actuators B 1, 244 (1990).
A. Manz, D.J. Harrison, E. Verpoorte, and H.M. Widmer, Adv. 684 (1998). Chromatogr. 33, 1 (1993).
A. Manz and H. Becker, Parallel Capillaries for High Throughput in Electrophoretic Separations and Electroosmotic Drug Discovery Systems (Chicago, 1997) p. 915.
J.C. McDonald, D.C. Duffy, J.R. Anderson, D.T. Chiu, H. Wu, O.J.A. Schueller, and G.M. Whitesides, Electrophoresis 21, 27 (2000).
W.K. Schomburg, J. Fahrenberg, D. Maas, and R. Rapp, J. Micromech. Microeng. 3, 216 (1993).
S. Shoji and M. Esachi, J. Micromech. Microeng. 4, 157 (1994).
P.C. Simpson, D. Roach, A.T. Woolley, T. Thorsen, R. Johnston, G.F. Sensabaugh, and R.A. Mathies, High-Throughput Genetic Analysis Using Microfabricated 96-Sample Capillary Array Electrophoresis Microplates, 95, 2256 (1998).
E.M.J. Verpoorte, B.H. van der Schoot, S. Jeanneret, H.M. Widmer, and N.F. de Rooij, J. Micromech. Microeng. 4, 246 (1994).
A.T. Woolley and R.A. Mathies, Anal. Chem. 67, 3676 (1995).
A.T. Woolley, K. Lao, A.N. Glazer, and R.A. Mathies, Anal. Chem. 70, 684 (1998)
Y. Xia and G.M. Whitesides, Angew. Chem. Int. Ed. 37, 550 (1998).
A.M. Young, T.M. Bloomstein, and S.T. Palmacci, Trans. ASME 121, 2 (1999).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Jeon, N.L., Chiu, D.T., Wargo, C.J. et al. Microfluidics Section: Design and Fabrication of Integrated Passive Valves and Pumps for Flexible Polymer 3-Dimensional Microfluidic Systems. Biomedical Microdevices 4, 117–121 (2002). https://doi.org/10.1023/A:1014683114796
Issue Date:
DOI: https://doi.org/10.1023/A:1014683114796