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Preparation of diamond-like carbon thin films by shielded arc ion plating

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Materials Processing Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-01, Japan

    Y. Taki, T. Kitagawa & O. Takai

Authors
  1. Y. Taki
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  2. T. Kitagawa
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  3. O. Takai
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Taki, Y., Kitagawa, T. & Takai, O. Preparation of diamond-like carbon thin films by shielded arc ion plating. Journal of Materials Science Letters 16, 553–556 (1997). https://doi.org/10.1023/A:1018513804905

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