By making use of polarization control, researchers have achieved a record 100-nm resolution when imaging buried transistors in an integrated circuit.
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Ippolito, S. Polarized high-resolution imaging. Nature Photon 2, 273–274 (2008). https://doi.org/10.1038/nphoton.2008.61
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DOI: https://doi.org/10.1038/nphoton.2008.61
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