Scalable fabrication of high-performance and flexible graphene strain sensors

He Tian; Yi Shu; Ya-Long Cui; Wen-Tian Mi; Yi Yang; Dan Xie; Tian-Ling Ren

doi:10.1039/C3NR04521H

Scalable fabrication of high-performance and flexible graphene strain sensors†

He Tian,‡^ab Yi Shu,‡^ab Ya-Long Cui,‡^ab Wen-Tian Mi,^ab Yi Yang,^ab Dan Xie^ab and Tian-Ling Ren*^ab

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* Corresponding authors

^a Institute of Microelectronics, Tsinghua University, Beijing 100084, China
E-mail: RenTL@tsinghua.edu.cn

^b Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China

Abstract

Graphene strain sensors have promising prospects of applications in detecting human motion. However, the shortage of graphene growth and patterning techniques has become a challenging issue hindering the application of graphene strain sensors. Therefore, we propose wafer-scale flexible strain sensors with high-performance, which can be fabricated in one-step laser scribing. The graphene films could be obtained by directly reducing graphene oxide film in a Light-Scribe DVD burner. The gauge factor (GF) of the graphene strain sensor (10 mm × 10 mm square) is 0.11. In order to enhance the GF further, graphene micro-ribbons (20 μm width, 0.6 mm long) has been used as strain sensors, of which the GF is up to 9.49. The devices may conform to various application requirements, such as high GF for low-strain applications and low GF for high deformation applications. The work indicates that laser scribed flexible graphene strain sensors could be widely used in medical-sensing, bio-sensing, artificial skin and many other areas.

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DOI: https://doi.org/10.1039/C3NR04521H
Article type: Communication
Submitted: 24 Aug 2013
Accepted: 20 Oct 2013
First published: 23 Oct 2013

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Nanoscale, 2014,6, 699-705

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Scalable fabrication of high-performance and flexible graphene strain sensors

H. Tian, Y. Shu, Y. Cui, W. Mi, Y. Yang, D. Xie and T. Ren, Nanoscale, 2014, 6, 699 DOI: 10.1039/C3NR04521H

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Scalable fabrication of high-performance and flexible graphene strain sensors†

Abstract

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Scalable fabrication of high-performance and flexible graphene strain sensors

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