Issue 111, 2015

Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

Abstract

Nanographitic structures (NGSs) with a multitude of morphological features are grown on SiO2/Si substrates by electron cyclotron resonance-plasma enhanced chemical vapor deposition (ECR-PECVD). CH4 is used as a source gas with Ar and H2 used as diluents. Field emission scanning electron microscopy, high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy are used to study the structural and morphological features of the grown films. Herein we demonstrate how the morphology of these structures can be tuned from a planar to a vertical structure using a single control parameter, namely the level of dilution of CH4 with Ar and/or H2. Our results show that competitive growth and etching processes dictate the morphology of the NGSs. While an Ar-rich composition favors vertically oriented graphene nanosheets, an H2-rich composition aids the growth of planar films. Raman analysis reveals the dilution of CH4 with either Ar or H2 or with the two in combination helps to improve the structural quality of the films. Line shape analysis of the Raman 2D bands shows a nearly symmetrical Lorentzian profile which confirms the turbostratic nature of the grown NGSs. This aspect is further elucidated by HRTEM studies where an elliptical diffraction pattern is observed. Based on these experiments, a comprehensive understanding is obtained of the growth and the structural properties of NGSs grown over a wide range of feedstock compositions.

Graphical abstract: Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

Article information

Article type
Paper
Submitted
08 Oct 2015
Accepted
15 Oct 2015
First published
15 Oct 2015

RSC Adv., 2015,5, 91922-91931

Flipping growth orientation of nanographitic structures by plasma enhanced chemical vapor deposition

S. Ghosh, K. Ganesan, S. R. Polaki, S. Ilango, S. Amirthapandian, S. Dhara, M. Kamruddin and A. K. Tyagi, RSC Adv., 2015, 5, 91922 DOI: 10.1039/C5RA20820C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements