While the progress in device development of perovskite solar cells is rapidly evolving, details of the film formation and the interplay of processing parameters, structural and compositional properties of deposited phases and their stability are still under dispute. Here we present a detailed structural analysis of methylammonium lead halide (I, Cl) films by in situ X-ray diffraction during their growth and thermal recrystallization up to their decomposition. MAPbI₃ films grown by co-evaporating MAI and PbI₂ are compared to MAPbI₃(Cl) films derived from an evaporation route using MAI and PbCl₂ precursors. The main differences observed between the two routes are varying crystal structures at room temperature and differently limited process windows, but similar overall growth, recrystallization and decomposition features. The preferential orientation of the pure MAPbI₃ is shown to depend on the applied molar precursor flux ratio and can additionally be modified by thermal annealing.