Issue 8, 2009

Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics

Abstract

In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 µm resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 µm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.

Graphical abstract: Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics

Supplementary files

Article information

Article type
Technical Note
Submitted
13 Oct 2008
Accepted
02 Feb 2009
First published
03 Mar 2009

Lab Chip, 2009,9, 1128-1132

Direct projection on dry-film photoresist (DP2): do-it-yourself three-dimensional polymer microfluidics

S. Zhao, H. Cong and T. Pan, Lab Chip, 2009, 9, 1128 DOI: 10.1039/B817925E

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