Thermoelectric characteristics of (Zn,Al)O/hydroquinone superlattices
Abstract
Thin ZnO layers doped with aluminum and interspersed with regularly repeating single layers of organic molecules are deposited by a combined atomic layer deposition (ALD) and molecular layer deposition (MLD) method at 220 °C using diethyl zinc, trimethyl aluminum, water and hydroquinone (HQ) as precursors. Hydroquinone is found to form distinct layers within the (Zn,Al)O framework such that clear inorganic–organic superlattice structures are realized. Aluminum doping efficiently offsets the decrease in carrier concentration caused by the organic layers, and enables enhanced electrical conductivities for the co-doped (Al plus HQ) thin films. Since superlattice structures in general are known to be highly beneficial in blocking the phonon transport in different materials, our ALD/MLD grown (Zn,Al)O:HQ thin films possess a lot of promise for new types of thermoelectrics.