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Micromachined varactor with wide tuning range

Micromachined varactor with wide tuning range

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Published

A micromachined variable capacitor that achieves a wide tuning range is proposed. The device, which was fabricated in a polysilicon surface micromachining process, has a tuning range of 25% and a quality factor of 9.6 at 1 GHz when the capacitance is tuned to 4 pF.

Inspec keywords: varactors; Q-factor; micromachining; tuning

Other keywords: surface micromachining; polysilicon; quality factor; 4 pF; tuning range; 1 GHz; variable capacitor; Si; varactor

Subjects: Junction and barrier diodes; MEMS and NEMS device technology; Capacitors

References

    1. 1)
      • Young, D.J., Boser, B.E.: `A micromachined variable capacitor for monolithic low-noise VCOs', Solid-State Sens. Actuator Workshop Digest, 1996, p. 86–89.
    2. 2)
      • Koester, D.A., Mahadevan, R., Shishkoff, A., Markus, K.W.: `Smart-MUMPs design handbook including MUMPS introduction and design rules(rev. 4)', MEMS Technology Applications Center MCNC, July 1996, p. 1–8.
    3. 3)
      • Razavi, B.: `A 1.8 GHz voltage controlled oscillator', ISSCC Dig. Tech. Papers, 1997, p. 388–389.
    4. 4)
      • Dauphinee, L., Copeland, M., Schvan, P.: `A balanced 1.5 GHz voltage controlled oscillator with an integrated LCresonator', IEEE ISSCC Dig. Tech. Papers, February 1997, p. 390–391.
    5. 5)
      • J. Fenk , S. Pipilos , Y.P. Tsividis , Y. Papananos . A Si 1.8GHz RLC filter with tunable center frequency and quality factor. IEEE J. Solid-State Circuits , 1517 - 1525
    6. 6)
      • K.E. Petersen . Silicon as a mechanical material. Proc. IEEE , 420 - 457
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