Scanning optical microscope
Scanning optical microscope
- Author(s): C.J.R. Sheppard
- DOI: 10.1049/ep.1980.0088
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- Author(s): C.J.R. Sheppard 1
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View affiliations
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Affiliations:
1: Department of Engineering Science, Pembroke College, Oxford, UK
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Affiliations:
1: Department of Engineering Science, Pembroke College, Oxford, UK
- Source:
Volume 26, Issue 2,
February 1980,
p.
166 – 172
DOI: 10.1049/ep.1980.0088 , Print ISSN 0013-5127, Online ISSN 2053-7883
© The Institution of Electrical Engineers
Published
The scanning optical microscope uses a laser spot to examine a specimen. This technique improves on the resolution and contrast of the conventional microscope, and so has particular advantages for the study of semiconductor materials and devices and living biological specimens
References
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